JPH0455523B2 - - Google Patents

Info

Publication number
JPH0455523B2
JPH0455523B2 JP2031370A JP3137090A JPH0455523B2 JP H0455523 B2 JPH0455523 B2 JP H0455523B2 JP 2031370 A JP2031370 A JP 2031370A JP 3137090 A JP3137090 A JP 3137090A JP H0455523 B2 JPH0455523 B2 JP H0455523B2
Authority
JP
Japan
Prior art keywords
mask
coordinate system
stage
pattern
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2031370A
Other languages
English (en)
Japanese (ja)
Other versions
JPH038319A (ja
Inventor
Shoichi Tanimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP2031370A priority Critical patent/JPH038319A/ja
Publication of JPH038319A publication Critical patent/JPH038319A/ja
Publication of JPH0455523B2 publication Critical patent/JPH0455523B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2031370A 1990-02-14 1990-02-14 露光装置の位置合わせ装置及び方法 Granted JPH038319A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2031370A JPH038319A (ja) 1990-02-14 1990-02-14 露光装置の位置合わせ装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2031370A JPH038319A (ja) 1990-02-14 1990-02-14 露光装置の位置合わせ装置及び方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58035737A Division JPS59161815A (ja) 1982-10-22 1983-03-07 投影露光装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP6159700A Division JP2546537B2 (ja) 1994-06-20 1994-06-20 投影露光装置及び方法
JP6159701A Division JP2713552B2 (ja) 1994-06-20 1994-06-20 露光装置

Publications (2)

Publication Number Publication Date
JPH038319A JPH038319A (ja) 1991-01-16
JPH0455523B2 true JPH0455523B2 (OSRAM) 1992-09-03

Family

ID=12329370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2031370A Granted JPH038319A (ja) 1990-02-14 1990-02-14 露光装置の位置合わせ装置及び方法

Country Status (1)

Country Link
JP (1) JPH038319A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11880125B2 (en) * 2019-07-04 2024-01-23 Maxell, Ltd. Information display system having acute-angled diffusion characteristics and image light control film used for the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4052603A (en) * 1974-12-23 1977-10-04 International Business Machines Corporation Object positioning process and apparatus
JPS569883A (en) * 1979-07-03 1981-01-31 Fujitsu Ltd Information input unit
JPS5780724A (en) * 1980-11-07 1982-05-20 Nippon Kogaku Kk <Nikon> Positioning device

Also Published As

Publication number Publication date
JPH038319A (ja) 1991-01-16

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