JPH0454140B2 - - Google Patents

Info

Publication number
JPH0454140B2
JPH0454140B2 JP59195072A JP19507284A JPH0454140B2 JP H0454140 B2 JPH0454140 B2 JP H0454140B2 JP 59195072 A JP59195072 A JP 59195072A JP 19507284 A JP19507284 A JP 19507284A JP H0454140 B2 JPH0454140 B2 JP H0454140B2
Authority
JP
Japan
Prior art keywords
air
ceiling
clean room
cleanliness
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59195072A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6172947A (ja
Inventor
Takayoshi Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP59195072A priority Critical patent/JPS6172947A/ja
Priority to US06/862,227 priority patent/US4693175A/en
Priority to DE8585904674T priority patent/DE3570514D1/de
Priority to PH32792A priority patent/PH22626A/en
Priority to IN726/MAS/85A priority patent/IN166273B/en
Priority to GB08610935A priority patent/GB2176278B/en
Priority to KR1019860700257A priority patent/KR930009610B1/ko
Priority to EP85904674A priority patent/EP0196333B1/en
Priority to PCT/JP1985/000516 priority patent/WO1986001879A1/ja
Publication of JPS6172947A publication Critical patent/JPS6172947A/ja
Priority to SG220/89A priority patent/SG22089G/en
Priority to HK21592A priority patent/HK21592A/xx
Publication of JPH0454140B2 publication Critical patent/JPH0454140B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Central Air Conditioning (AREA)
JP59195072A 1984-09-18 1984-09-18 クリ−ンル−ムの形成法およびこの方法に使用する空気調和設備ユニツト Granted JPS6172947A (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP59195072A JPS6172947A (ja) 1984-09-18 1984-09-18 クリ−ンル−ムの形成法およびこの方法に使用する空気調和設備ユニツト
GB08610935A GB2176278B (en) 1984-09-18 1985-09-17 Clean room constructing system
DE8585904674T DE3570514D1 (en) 1984-09-18 1985-09-17 Clean room constructing system
PH32792A PH22626A (en) 1984-09-18 1985-09-17 Clean room system
IN726/MAS/85A IN166273B (en:Method) 1984-09-18 1985-09-17
US06/862,227 US4693175A (en) 1984-09-18 1985-09-17 Clean room system
KR1019860700257A KR930009610B1 (ko) 1984-09-18 1985-09-17 클리인 루움 구축 시스템
EP85904674A EP0196333B1 (en) 1984-09-18 1985-09-17 Clean room constructing system
PCT/JP1985/000516 WO1986001879A1 (en) 1984-09-18 1985-09-17 Clean room constructing system
SG220/89A SG22089G (en) 1984-09-18 1989-04-08 Clean room constructing system
HK21592A HK21592A (en) 1984-09-18 1992-03-26 Clean room constructing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59195072A JPS6172947A (ja) 1984-09-18 1984-09-18 クリ−ンル−ムの形成法およびこの方法に使用する空気調和設備ユニツト

Publications (2)

Publication Number Publication Date
JPS6172947A JPS6172947A (ja) 1986-04-15
JPH0454140B2 true JPH0454140B2 (en:Method) 1992-08-28

Family

ID=16335085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59195072A Granted JPS6172947A (ja) 1984-09-18 1984-09-18 クリ−ンル−ムの形成法およびこの方法に使用する空気調和設備ユニツト

Country Status (10)

Country Link
US (1) US4693175A (en:Method)
EP (1) EP0196333B1 (en:Method)
JP (1) JPS6172947A (en:Method)
KR (1) KR930009610B1 (en:Method)
DE (1) DE3570514D1 (en:Method)
GB (1) GB2176278B (en:Method)
IN (1) IN166273B (en:Method)
PH (1) PH22626A (en:Method)
SG (1) SG22089G (en:Method)
WO (1) WO1986001879A1 (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001153414A (ja) * 1999-11-25 2001-06-08 Takasago Thermal Eng Co Ltd 循環型クリーンルーム
JP2019090576A (ja) * 2017-11-15 2019-06-13 株式会社桜アーク 清浄ユニット
JP2020193785A (ja) * 2019-05-29 2020-12-03 ダイキン工業株式会社 空調システム

Families Citing this family (88)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0147143B1 (en) * 1983-12-16 1991-04-17 Nitta Co., Ltd. Air cleaner
US5464774A (en) * 1984-03-05 1995-11-07 The Salk Institute For Biological Studies Bovine basic fibroblast growth factor
US4667579A (en) * 1985-10-03 1987-05-26 Daw, Incorporated Cleanroom structure
DE8630050U1 (de) * 1986-11-11 1987-01-15 Slee Semiconductor-Technik GmbH, 6500 Mainz Transportable Reinraumanlage
US4819549A (en) * 1988-02-05 1989-04-11 Donaldson Company Inc. End seal for clean room ceiling supports
KR0156237B1 (ko) * 1988-06-03 1998-12-01 고다까 토시오 처리액 공급 장치
US5175147A (en) * 1988-08-19 1992-12-29 Takeda Chemical Industries, Ltd Acid-resistant fgf composition and method of treating ulcerating diseases of the gastrointestinal tract
DE3836147C2 (de) * 1988-10-23 1996-03-21 Ltg Lufttechnische Gmbh Reinraumdecke
US4976757A (en) * 1989-05-04 1990-12-11 Comp-Aire Systems, Inc. Filtration plenum module constructed for on-site assembly
US5029518A (en) * 1989-10-16 1991-07-09 Clean Air Technology, Inc. Modular clean room structure
JPH03291436A (ja) * 1990-04-05 1991-12-20 N M B Semiconductor:Kk 半導体製造工場のクリーンルーム
EP0457747B1 (en) * 1990-05-11 1994-11-30 Albert Dupont Wine recorking apparatus and method
JP2561749B2 (ja) * 1990-10-11 1996-12-11 株式会社朝日工業社 クリ−ンル−ムの空気循環方法
DE4115171C2 (de) * 1991-05-09 1995-02-23 Daldrop & Dr Ing Huber Gmbh & Ventilator-Filtereinheit für Reinraumdecken
DE4122582C2 (de) * 1991-07-08 1994-12-15 Babcock Bsh Ag Modul zum Aufbau einer Reinraumdecke
JP3309416B2 (ja) * 1992-02-13 2002-07-29 松下電器産業株式会社 連結式クリーン空間装置
US5417610A (en) * 1992-11-06 1995-05-23 Daw Technologies, Inc. Method and device for reducing vortices at a cleanroom ceiling
US5350336A (en) * 1993-04-23 1994-09-27 Industrial Technology Research Institute Building and method for manufacture of integrated semiconductor circuit devices
JP3470370B2 (ja) * 1994-01-24 2003-11-25 富士通株式会社 塵埃粒子発生位置特定装置および方法ならびにクリーンルーム
TW253028B (en) * 1994-03-22 1995-08-01 Daw Technologies Inc Method and device for improved unidirectional airflow in cleanroom
DE4412583C1 (de) * 1994-04-13 1995-09-14 Daldrop & Dr Ing Huber Gmbh & Ventilator-Filtereinheit für Reinraumdecken
US5641354A (en) * 1995-07-10 1997-06-24 Seh America, Inc. Puller cell
TW346443B (en) * 1995-11-02 1998-12-01 Toyo Koban Kk Method and apparatus for production of laminated metal sheet
JPH1130436A (ja) * 1997-07-11 1999-02-02 Nittetsu Semiconductor Kk クリーンルーム及びクリーンルームの改装方法
US5858041A (en) * 1997-08-22 1999-01-12 David Luetkemeyer Clean air system
JP3911904B2 (ja) * 1999-04-21 2007-05-09 株式会社日立プラントテクノロジー クリーンルーム構造
US6102977A (en) * 1998-06-18 2000-08-15 Seh America, Inc. Make-up air handler and method for supplying boron-free outside air to clean rooms
IL126866A (en) * 1998-11-02 2003-02-12 Orbotech Ltd Apparatus and method for fabricating flat workpieces
SE513220C2 (sv) * 1998-12-02 2000-07-31 Johnson Medical Dev Pte Ltd Sätt och anordning vid rumsventilation för s.k. renrum
US6174341B1 (en) * 1999-03-18 2001-01-16 Byron Burge Ceiling mounted air filtration system
US6378361B1 (en) 1999-07-16 2002-04-30 Vertical Wind Tunnel Corporation Method and apparatus for creating a wind tunnel by redirecting an air flow ninety degrees
DE29916321U1 (de) * 1999-09-16 1999-12-23 M + W Zander Facility Engineering GmbH + Co. KG, 70499 Stuttgart Reinstlufteinrichtung für den Pharmazie-, Lebensmittel- und biotechnischen Bereich
DE10029200A1 (de) * 2000-02-21 2001-08-23 Data Disc Robots Gmbh Prozeßklimatisierung
US6471582B1 (en) * 2001-08-14 2002-10-29 Applied Optoelectronics, Inc. Adapter for coupling air duct to fan-driven vent
US7105037B2 (en) * 2002-10-31 2006-09-12 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
US6676508B1 (en) * 2003-04-22 2004-01-13 Gerald Graham Magnetically controlled flow system
KR100524875B1 (ko) * 2003-06-28 2005-10-31 엘지.필립스 엘시디 주식회사 청정시스템
EP1544553B1 (de) * 2003-12-18 2009-10-07 M+W Zander Products GmbH Einrichtung zur Konditionierung von Umluft, vorzugsweise von Reinluft
CN102208535A (zh) * 2004-09-09 2011-10-05 国立大学法人北海道大学 太阳能电池及光电转换元件
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US7513822B2 (en) * 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
WO2007058418A2 (en) * 2005-11-21 2007-05-24 Lg Electronics, Inc. Air conditioning system
JP2009002634A (ja) * 2007-06-25 2009-01-08 Unitec Inc ユニット型クリーンルーム
US8003067B2 (en) * 2007-09-20 2011-08-23 Applied Materials, Inc. Apparatus and methods for ambient air abatement of electronic manufacturing effluent
US7819935B2 (en) * 2007-12-14 2010-10-26 Ge-Hitachi Nuclear Energy Americas Llc Air filtration for nuclear reactor habitability area
TWI382144B (zh) * 2008-01-04 2013-01-11 Fih Hong Kong Ltd 風淋室
US8899171B2 (en) 2008-06-13 2014-12-02 Kateeva, Inc. Gas enclosure assembly and system
US11975546B2 (en) 2008-06-13 2024-05-07 Kateeva, Inc. Gas enclosure assembly and system
US8383202B2 (en) 2008-06-13 2013-02-26 Kateeva, Inc. Method and apparatus for load-locked printing
US10442226B2 (en) 2008-06-13 2019-10-15 Kateeva, Inc. Gas enclosure assembly and system
US9048344B2 (en) 2008-06-13 2015-06-02 Kateeva, Inc. Gas enclosure assembly and system
US12064979B2 (en) 2008-06-13 2024-08-20 Kateeva, Inc. Low-particle gas enclosure systems and methods
US12018857B2 (en) 2008-06-13 2024-06-25 Kateeva, Inc. Gas enclosure assembly and system
US10434804B2 (en) 2008-06-13 2019-10-08 Kateeva, Inc. Low particle gas enclosure systems and methods
US9604245B2 (en) 2008-06-13 2017-03-28 Kateeva, Inc. Gas enclosure systems and methods utilizing an auxiliary enclosure
JP2010017662A (ja) * 2008-07-11 2010-01-28 Hitachi Appliances Inc 空気調和機用フィルタ及びそれを用いた空気調和機
AU2009330055B2 (en) 2008-12-23 2015-11-05 Xoma (Us) Llc Flexible manufacturing system
JP5401206B2 (ja) * 2009-08-10 2014-01-29 株式会社不二製作所 ブラスト室
KR20120054634A (ko) 2009-08-16 2012-05-30 지-콘, 엘엘씨 모듈식 자립형 이동식 청정실
US9795957B2 (en) 2009-08-16 2017-10-24 G-Con Manufacturing, Inc. Modular, self-contained, mobile clean room
TW201217716A (en) * 2010-10-27 2012-05-01 Hon Hai Prec Ind Co Ltd Container data center
US9581347B2 (en) * 2011-02-16 2017-02-28 John L. Fiorita, JR. Clean room control system and method
FR2987388B1 (fr) * 2012-02-27 2014-03-21 Guy Tajouri Salle propre
NL2008520C2 (nl) * 2012-03-22 2013-09-25 Atrined Cleanair Technology B V Ventilatiesysteem in een plafond van een werkruimte.
US12189828B2 (en) 2013-01-05 2025-01-07 Frederick A. Flitsch Customized smart devices and touchscreen devices and cleanspace manufacturing methods to make them
US10468279B2 (en) 2013-12-26 2019-11-05 Kateeva, Inc. Apparatus and techniques for thermal treatment of electronic devices
KR102307190B1 (ko) 2014-01-21 2021-09-30 카티바, 인크. 전자 장치 인캡슐레이션을 위한 기기 및 기술
EP3882961B1 (en) 2014-04-30 2023-07-26 Kateeva, Inc. Gas cushion apparatus and techniques for substrate coating
WO2016086192A1 (en) 2014-11-26 2016-06-02 Kateeva, Inc. Environmentally controlled coating systems
AU2016252618B2 (en) * 2015-04-20 2020-05-07 Synexis Llc Clean rooms having dilute hydrogen peroxide (DHP) gas and methods of use thereof
JP6576785B2 (ja) * 2015-10-16 2019-09-18 株式会社 ゼンショーホールディングス 無菌店舗システム
CN107796067A (zh) * 2017-03-06 2018-03-13 江苏嘉合建设有限公司 一种超净洁净室的建造方法
AT16910U1 (de) * 2018-01-04 2020-12-15 Ing Siegfried Manschein Ges M B H Modulares Klimasystem sowie Verfahren zum Klimatisieren eines Innenraums
DE202018000123U1 (de) 2018-01-10 2018-02-07 ZLT Lüftungs- und Brandschutztechnik GmbH akustisch optiemiertes Einbaugehäuse
JP7183567B2 (ja) * 2018-05-02 2022-12-06 Tdk株式会社 循環式ｅｆｅｍ
JP6761890B1 (ja) 2019-04-15 2020-09-30 ダイキン工業株式会社 空気調和システム
ES3008860T3 (en) 2019-04-15 2025-03-25 Daikin Ind Ltd Air conditioning system
ES2955485T3 (es) 2019-04-15 2023-12-01 Daikin Ind Ltd Sistema de suministro de aire
US12320540B2 (en) * 2019-04-15 2025-06-03 Daikin Industries, Ltd. Air conditioning system
BR112022002854B1 (pt) * 2019-08-15 2023-01-31 G-Con Manufacturing, Inc Aparelho de construção modular para fabricação de sala limpa farmacêutica e método de montar um aparelho de sala limpa modular para fabricação de sala limpa farmacêutica
US12092357B2 (en) * 2019-11-19 2024-09-17 Patrick D. Moloney HVAC system air intake manager and method of using same
CN114341559A (zh) * 2019-12-04 2022-04-12 日立环球生活方案株式会社 空气调节系统
US11492795B2 (en) 2020-08-31 2022-11-08 G-Con Manufacturing, Inc. Ballroom-style cleanroom assembled from modular buildings
EP4230230A4 (en) * 2020-10-16 2024-11-20 Fumio Takahashi AIR PURIFICATION DEVICE, AIR PURIFICATION METHOD AND AIR PURIFICATION SYSTEM
CN117545965A (zh) * 2021-06-17 2024-02-09 普锐医疗(香港)有限公司 洁净室模块
JP7737859B2 (ja) * 2021-10-13 2025-09-11 株式会社日立プラントサービス 空調装置の施工方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3638404A (en) * 1969-09-30 1972-02-01 Westinghouse Electric Corp Vertical laminar-flow clean room of flexible design
US3880625A (en) * 1973-09-28 1975-04-29 Moore And Hanks Company Filter system
US3949809A (en) * 1975-01-22 1976-04-13 Lennox Industries, Inc. Air processing apparatus
US4191543A (en) * 1977-12-23 1980-03-04 Peters Max D Sterile air recycling apparatus
US4344784A (en) * 1981-02-27 1982-08-17 Dexon, Inc. Filter assembly for clean air rooms and work stations
GB2099034A (en) * 1981-05-26 1982-12-01 Smith David Trevor Modular partition panel for ventilated enclosure
JPS58182046A (ja) * 1982-04-20 1983-10-24 Kajima Corp クリ−ンル−ム
JPS59157432A (ja) * 1983-02-23 1984-09-06 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室
JPS6071830A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001153414A (ja) * 1999-11-25 2001-06-08 Takasago Thermal Eng Co Ltd 循環型クリーンルーム
JP2019090576A (ja) * 2017-11-15 2019-06-13 株式会社桜アーク 清浄ユニット
JP2020193785A (ja) * 2019-05-29 2020-12-03 ダイキン工業株式会社 空調システム

Also Published As

Publication number Publication date
EP0196333A1 (en) 1986-10-08
GB8610935D0 (en) 1986-06-11
WO1986001879A1 (en) 1986-03-27
IN166273B (en:Method) 1990-04-07
DE3570514D1 (en) 1989-06-29
EP0196333A4 (en) 1987-02-12
PH22626A (en) 1988-10-28
KR930009610B1 (ko) 1993-10-07
US4693175A (en) 1987-09-15
JPS6172947A (ja) 1986-04-15
EP0196333B1 (en) 1989-05-24
KR880700219A (ko) 1988-02-20
GB2176278B (en) 1988-10-19
SG22089G (en) 1989-07-14
GB2176278A (en) 1986-12-17

Similar Documents

Publication Publication Date Title
JPH0454140B2 (en:Method)
US5213059A (en) Air conditioning unit for experimental animals
EP0250596B1 (en) Clean room
US4267769A (en) Prefabricated knockdown clean room
JPH0136009B2 (en:Method)
JP2000291989A (ja) 空調設備および空調方法
US10184686B2 (en) System for maintaining a pollutant controlled workspace
JPS5944538A (ja) クリ−ンル−ム用クリ−ンユニツトおよびクリ−ンル−ムシステム
JPH07145957A (ja) 室内空調装置
JPH0351647A (ja) クリーンルーム構築システム
JP7580895B2 (ja) クリーンルームの空調システム
JP7621407B2 (ja) クリーンルームの空調システム
CN221494739U (zh) 一种洁净厂房用控制洁净度的管道焊接装置
JPH0515933B2 (en:Method)
JP2551426Y2 (ja) 吹出口分散型の床面吹出し天井吸込み式空調設備
JPH0225065Y2 (en:Method)
JPS6314258B2 (en:Method)
JPH0568289B2 (en:Method)
JPH0315954Y2 (en:Method)
JPH0332917Y2 (en:Method)
JPH06294533A (ja) 清浄作業室
JP3060234B2 (ja) 建築物における室内の垂直方向の温度差を少なくする空調設備
JPH0647324Y2 (ja) 展示装置
JPH09100582A (ja) 建物の空調装置
TH4268B (th) ระบบห้องสะอาดแบบยืดหยุ่นเอนกประสงค์

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees