JPH04523B2 - - Google Patents

Info

Publication number
JPH04523B2
JPH04523B2 JP15343884A JP15343884A JPH04523B2 JP H04523 B2 JPH04523 B2 JP H04523B2 JP 15343884 A JP15343884 A JP 15343884A JP 15343884 A JP15343884 A JP 15343884A JP H04523 B2 JPH04523 B2 JP H04523B2
Authority
JP
Japan
Prior art keywords
optical axis
imaging lens
axis
mirror
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15343884A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6130705A (ja
Inventor
Masanori Idesawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP15343884A priority Critical patent/JPS6130705A/ja
Publication of JPS6130705A publication Critical patent/JPS6130705A/ja
Publication of JPH04523B2 publication Critical patent/JPH04523B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP15343884A 1984-07-24 1984-07-24 光触針装置 Granted JPS6130705A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15343884A JPS6130705A (ja) 1984-07-24 1984-07-24 光触針装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15343884A JPS6130705A (ja) 1984-07-24 1984-07-24 光触針装置

Publications (2)

Publication Number Publication Date
JPS6130705A JPS6130705A (ja) 1986-02-13
JPH04523B2 true JPH04523B2 (sk) 1992-01-07

Family

ID=15562524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15343884A Granted JPS6130705A (ja) 1984-07-24 1984-07-24 光触針装置

Country Status (1)

Country Link
JP (1) JPS6130705A (sk)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0726841B2 (ja) * 1987-04-21 1995-03-29 理化学研究所 光学的距離検出装置
JP2584630B2 (ja) * 1987-05-29 1997-02-26 理化学研究所 側面形状計測用光触針の構成
JP5309542B2 (ja) * 2007-12-05 2013-10-09 株式会社ニコン 測定装置およびその方法

Also Published As

Publication number Publication date
JPS6130705A (ja) 1986-02-13

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