JPH0451995Y2 - - Google Patents
Info
- Publication number
- JPH0451995Y2 JPH0451995Y2 JP1985074145U JP7414585U JPH0451995Y2 JP H0451995 Y2 JPH0451995 Y2 JP H0451995Y2 JP 1985074145 U JP1985074145 U JP 1985074145U JP 7414585 U JP7414585 U JP 7414585U JP H0451995 Y2 JPH0451995 Y2 JP H0451995Y2
- Authority
- JP
- Japan
- Prior art keywords
- robot
- wafer
- arm
- wafers
- storage member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 52
- 238000007599 discharging Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 9
- 239000000428 dust Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 5
- 230000002950 deficient Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 244000052616 bacterial pathogen Species 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985074145U JPH0451995Y2 (US20020128544A1-20020912-P00008.png) | 1985-05-21 | 1985-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985074145U JPH0451995Y2 (US20020128544A1-20020912-P00008.png) | 1985-05-21 | 1985-05-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61191886U JPS61191886U (US20020128544A1-20020912-P00008.png) | 1986-11-29 |
| JPH0451995Y2 true JPH0451995Y2 (US20020128544A1-20020912-P00008.png) | 1992-12-07 |
Family
ID=30614165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985074145U Expired JPH0451995Y2 (US20020128544A1-20020912-P00008.png) | 1985-05-21 | 1985-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451995Y2 (US20020128544A1-20020912-P00008.png) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0622258B2 (ja) * | 1987-07-24 | 1994-03-23 | 日立電子エンジニアリング株式会社 | ウエハ表面検査装置 |
| US5054988A (en) * | 1988-07-13 | 1991-10-08 | Tel Sagami Limited | Apparatus for transferring semiconductor wafers |
| JP2000042953A (ja) * | 1998-07-29 | 2000-02-15 | Janome Sewing Mach Co Ltd | 水平多関節ロボット |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58155195A (ja) * | 1982-03-05 | 1983-09-14 | 株式会社小松製作所 | ロボツトア−ム装置 |
| JPS5924292B2 (ja) * | 1976-10-15 | 1984-06-08 | カヤバ工業株式会社 | 車高調整式シヨツクアブソ−バ |
| JPS59156688A (ja) * | 1983-02-21 | 1984-09-05 | ダイキン工業株式会社 | 三点把持形ハンド |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924292U (ja) * | 1982-08-05 | 1984-02-15 | 東京エレクトロン株式会社 | 腕状機構 |
-
1985
- 1985-05-21 JP JP1985074145U patent/JPH0451995Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924292B2 (ja) * | 1976-10-15 | 1984-06-08 | カヤバ工業株式会社 | 車高調整式シヨツクアブソ−バ |
| JPS58155195A (ja) * | 1982-03-05 | 1983-09-14 | 株式会社小松製作所 | ロボツトア−ム装置 |
| JPS59156688A (ja) * | 1983-02-21 | 1984-09-05 | ダイキン工業株式会社 | 三点把持形ハンド |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61191886U (US20020128544A1-20020912-P00008.png) | 1986-11-29 |
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