JPH0450263B2 - - Google Patents

Info

Publication number
JPH0450263B2
JPH0450263B2 JP32562688A JP32562688A JPH0450263B2 JP H0450263 B2 JPH0450263 B2 JP H0450263B2 JP 32562688 A JP32562688 A JP 32562688A JP 32562688 A JP32562688 A JP 32562688A JP H0450263 B2 JPH0450263 B2 JP H0450263B2
Authority
JP
Japan
Prior art keywords
quartz glass
glass
synthetic quartz
nitrogen
silica
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP32562688A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02172832A (ja
Inventor
Masatoshi Takita
Takaaki Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP32562688A priority Critical patent/JPH02172832A/ja
Priority to US07/404,585 priority patent/US4979973A/en
Priority to DE8989402471T priority patent/DE68905735T2/de
Priority to EP89402471A priority patent/EP0360659B1/en
Publication of JPH02172832A publication Critical patent/JPH02172832A/ja
Publication of JPH0450263B2 publication Critical patent/JPH0450263B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
JP32562688A 1988-09-13 1988-12-22 合成石英ガラスおよびその製造方法 Granted JPH02172832A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP32562688A JPH02172832A (ja) 1988-12-22 1988-12-22 合成石英ガラスおよびその製造方法
US07/404,585 US4979973A (en) 1988-09-13 1989-09-08 Preparation of fused silica glass by hydrolysis of methyl silicate
DE8989402471T DE68905735T2 (de) 1988-09-13 1989-09-11 Synthetisches geschmolzenes quarzglas und verfahren zu dessen herstellung.
EP89402471A EP0360659B1 (en) 1988-09-13 1989-09-11 Synthetic fused silica glass and method for the preparation thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32562688A JPH02172832A (ja) 1988-12-22 1988-12-22 合成石英ガラスおよびその製造方法

Publications (2)

Publication Number Publication Date
JPH02172832A JPH02172832A (ja) 1990-07-04
JPH0450263B2 true JPH0450263B2 (cg-RX-API-DMAC10.html) 1992-08-13

Family

ID=18178958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32562688A Granted JPH02172832A (ja) 1988-09-13 1988-12-22 合成石英ガラスおよびその製造方法

Country Status (1)

Country Link
JP (1) JPH02172832A (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0394843A (ja) * 1989-09-04 1991-04-19 Shin Etsu Chem Co Ltd 合成石英ガラスるつぼおよびその製造方法
JPH085683B2 (ja) * 1989-07-06 1996-01-24 信越石英株式会社 耐熱性及び加工性の優れた合成石英ガラス部材の製造方法
KR100566051B1 (ko) * 1998-07-31 2006-03-29 신에쯔 세끼에이 가부시키가이샤 실리콘 단결정 인상용 석영 유리 도가니 및 그 제조방법

Also Published As

Publication number Publication date
JPH02172832A (ja) 1990-07-04

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