JPH0449258B2 - - Google Patents

Info

Publication number
JPH0449258B2
JPH0449258B2 JP58143694A JP14369483A JPH0449258B2 JP H0449258 B2 JPH0449258 B2 JP H0449258B2 JP 58143694 A JP58143694 A JP 58143694A JP 14369483 A JP14369483 A JP 14369483A JP H0449258 B2 JPH0449258 B2 JP H0449258B2
Authority
JP
Japan
Prior art keywords
spin
film
insulating film
wiring
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58143694A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6035535A (ja
Inventor
Takayuki Matsui
Jun Kanamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP14369483A priority Critical patent/JPS6035535A/ja
Publication of JPS6035535A publication Critical patent/JPS6035535A/ja
Publication of JPH0449258B2 publication Critical patent/JPH0449258B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP14369483A 1983-08-08 1983-08-08 半導体装置の製造方法 Granted JPS6035535A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14369483A JPS6035535A (ja) 1983-08-08 1983-08-08 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14369483A JPS6035535A (ja) 1983-08-08 1983-08-08 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6035535A JPS6035535A (ja) 1985-02-23
JPH0449258B2 true JPH0449258B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-11

Family

ID=15344786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14369483A Granted JPS6035535A (ja) 1983-08-08 1983-08-08 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6035535A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62295437A (ja) * 1986-06-14 1987-12-22 Yamaha Corp 多層配線形成法
JPH0611079B2 (ja) * 1986-09-05 1994-02-09 日本電気株式会社 半導体装置
DE69426048T2 (de) 1993-07-28 2001-05-10 Chugai Photo Chemical Co. Ltd., Tokio/Tokyo Zusammensetzung enthaltend eine Farbentwicklersubstanz, Farbentwickler zur Verarbeitung von photographischen Silberhalogenidfarbmaterialien und deren Verwendung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53104186A (en) * 1977-02-23 1978-09-11 Hitachi Ltd Multilayer wiring body

Also Published As

Publication number Publication date
JPS6035535A (ja) 1985-02-23

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