JPH0448870Y2 - - Google Patents
Info
- Publication number
- JPH0448870Y2 JPH0448870Y2 JP1987022487U JP2248787U JPH0448870Y2 JP H0448870 Y2 JPH0448870 Y2 JP H0448870Y2 JP 1987022487 U JP1987022487 U JP 1987022487U JP 2248787 U JP2248787 U JP 2248787U JP H0448870 Y2 JPH0448870 Y2 JP H0448870Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- liquid
- cleaning liquid
- tank
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 155
- 238000004140 cleaning Methods 0.000 claims description 147
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 238000011084 recovery Methods 0.000 description 41
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 238000005187 foaming Methods 0.000 description 12
- 230000007246 mechanism Effects 0.000 description 8
- 239000004094 surface-active agent Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000006260 foam Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987022487U JPH0448870Y2 (enrdf_load_stackoverflow) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987022487U JPH0448870Y2 (enrdf_load_stackoverflow) | 1987-02-18 | 1987-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63130183U JPS63130183U (enrdf_load_stackoverflow) | 1988-08-25 |
| JPH0448870Y2 true JPH0448870Y2 (enrdf_load_stackoverflow) | 1992-11-17 |
Family
ID=30819919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987022487U Expired JPH0448870Y2 (enrdf_load_stackoverflow) | 1987-02-18 | 1987-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448870Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007203140A (ja) * | 2006-01-31 | 2007-08-16 | Hitachi High-Technologies Corp | ワークの薬液洗浄方法および洗浄装置 |
| WO2013057992A1 (ja) * | 2011-10-20 | 2013-04-25 | 株式会社村田製作所 | 加工廃液循環装置 |
-
1987
- 1987-02-18 JP JP1987022487U patent/JPH0448870Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63130183U (enrdf_load_stackoverflow) | 1988-08-25 |
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