JPH0448492B2 - - Google Patents
Info
- Publication number
- JPH0448492B2 JPH0448492B2 JP12386090A JP12386090A JPH0448492B2 JP H0448492 B2 JPH0448492 B2 JP H0448492B2 JP 12386090 A JP12386090 A JP 12386090A JP 12386090 A JP12386090 A JP 12386090A JP H0448492 B2 JPH0448492 B2 JP H0448492B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- workpiece
- preliminary
- vacuum chamber
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000011282 treatment Methods 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 238000009489 vacuum treatment Methods 0.000 description 2
- 208000005156 Dehydration Diseases 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12386090A JPH03267138A (ja) | 1990-05-14 | 1990-05-14 | 真空処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12386090A JPH03267138A (ja) | 1990-05-14 | 1990-05-14 | 真空処理装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8492380A Division JPS5718737A (en) | 1980-06-21 | 1980-06-21 | Apparatus for continuous plasma treatment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03267138A JPH03267138A (ja) | 1991-11-28 |
| JPH0448492B2 true JPH0448492B2 (enrdf_load_stackoverflow) | 1992-08-06 |
Family
ID=14871183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12386090A Granted JPH03267138A (ja) | 1990-05-14 | 1990-05-14 | 真空処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03267138A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103057133A (zh) * | 2011-10-19 | 2013-04-24 | 苏州市奥普斯等离子体科技有限公司 | 一种高分子材料表面改性等离子体处理方法及其装置 |
-
1990
- 1990-05-14 JP JP12386090A patent/JPH03267138A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03267138A (ja) | 1991-11-28 |
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