JPH0446864B2 - - Google Patents

Info

Publication number
JPH0446864B2
JPH0446864B2 JP61052456A JP5245686A JPH0446864B2 JP H0446864 B2 JPH0446864 B2 JP H0446864B2 JP 61052456 A JP61052456 A JP 61052456A JP 5245686 A JP5245686 A JP 5245686A JP H0446864 B2 JPH0446864 B2 JP H0446864B2
Authority
JP
Japan
Prior art keywords
plate
holding
fluid
gap
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61052456A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62211236A (ja
Inventor
Hiromitsu Tokisue
Nobuo Tsumaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5245686A priority Critical patent/JPS62211236A/ja
Publication of JPS62211236A publication Critical patent/JPS62211236A/ja
Publication of JPH0446864B2 publication Critical patent/JPH0446864B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Manipulator (AREA)
JP5245686A 1986-03-12 1986-03-12 板状体の保持装置 Granted JPS62211236A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5245686A JPS62211236A (ja) 1986-03-12 1986-03-12 板状体の保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5245686A JPS62211236A (ja) 1986-03-12 1986-03-12 板状体の保持装置

Publications (2)

Publication Number Publication Date
JPS62211236A JPS62211236A (ja) 1987-09-17
JPH0446864B2 true JPH0446864B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-31

Family

ID=12915219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5245686A Granted JPS62211236A (ja) 1986-03-12 1986-03-12 板状体の保持装置

Country Status (1)

Country Link
JP (1) JPS62211236A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241841A (ja) * 1988-08-01 1990-02-13 Hitachi Ltd 非平面形状を有する物体の保持装置
JP2865690B2 (ja) * 1989-02-17 1999-03-08 株式会社日立製作所 嵌合挿入装置
US4969676A (en) * 1989-06-23 1990-11-13 At&T Bell Laboratories Air pressure pick-up tool
US5169196A (en) * 1991-06-17 1992-12-08 Safabakhsh Ali R Non-contact pick-up head
JP2000511354A (ja) * 1996-05-31 2000-08-29 アイペック・プリシジョン・インコーポレーテッド ウェーハ状物品のための非接触保持器
JP4243766B2 (ja) 2006-10-02 2009-03-25 Ｓｍｃ株式会社 非接触搬送装置
CN102639415B (zh) * 2009-07-22 2015-05-20 齐默尔曼和席尔普搬运技术有限责任公司 无接触式真空夹持器
JP5403247B2 (ja) * 2009-09-07 2014-01-29 村田機械株式会社 基板移載装置
GB2584069B (en) * 2019-03-27 2023-11-08 Millitec Food Systems Ltd Flow gripper

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525037A (en) * 1978-08-09 1980-02-22 Seiko Epson Corp Liquid form material injecting of display body
JPS5918435U (ja) * 1982-07-27 1984-02-04 日本電気ホームエレクトロニクス株式会社 非接触型ウエ−ハチヤツク

Also Published As

Publication number Publication date
JPS62211236A (ja) 1987-09-17

Similar Documents

Publication Publication Date Title
JP5110480B2 (ja) 非接触搬送装置
EP1715514B1 (en) Non-contact carrier device
JPH0446864B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN104614137B (zh) 基于静压气浮解耦装置的三分量标准振动台
CN103386689B (zh) 输送夹具及输送保持装置
JP2010240639A (ja) 流体液滴吐出用ノズル形状
US6969224B2 (en) Workpiece levitating device
JP2619436B2 (ja) 板状体の保持装置
JP5178215B2 (ja) 浮上用構造体、スライド部材およびステージ装置
JP4982875B2 (ja) シート状物品のための非接触パッド
JP2014218342A (ja) 支持用エアプレートおよびその気体流抵抗器
Joshi et al. Keynote Lecture: Micro and Meso Scale Compact Heat Exchangers in Electronics Thermal Management–Review
KR20120116909A (ko) 진공 척
JPH0512113B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN101626842B (zh) 喷嘴、干洗机和干洗机系统
JP6276318B2 (ja) 吸着スタンド
JPH02138044A (ja) 板状体の保持装置
TW200936475A (en) Air floating table with novel injection pattern
JPS6387439A (ja) 板状体の保持装置
JP4025116B2 (ja) 板材加工機械の板材支持テーブル
JP2002280439A (ja) 搬送装置
JPH0215461B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2005191553A (ja) ワーク浮上装置
JPH0241841A (ja) 非平面形状を有する物体の保持装置
JP4324350B2 (ja) 球体支持ユニット