200936475 狄、發明說明： 【發明所屬之技術領域】 =發雜_於—種平台，特難具有特殊結構之進氣裝置及排氣裝 附>於該平Q本體之基板氣浮平台，且該基板氣浮平纟賦予特定供氣源 及排氣裝置，該排氣裝置可為真空泵浦或是其他可提供低於表遷之負盧提 供裝置或可f助郝大氣魏之裝置，航—正壓供氣源及職裝置，並 利用特殊之氣袋結射以有效克服不穩定流料致的震盪行為使承載物 件可受平穩撐持。 【先前技術】 氣浮平台之應雌極為廣泛，凡舉有關於LCD面板顧之玻璃基板、 彩色濾光#、晶®、電路板等，其對於加工過程巾靜電之產生極為敏感， 而導致工作物件之損壞造減品良率之衰減，故常藉魏浮平台之應用以 克服上述問題，其重要性不容小覷。 習用氣浮平台所選用之進氣裝置皆直接在平台本體設置多數個注氣 孔，该注氣孔皆以鑽穿成形之直式導管。然而迫於產品產生效率及良率之 提升，產線上之工作物件將進行全面之檢測，但該設計之氣浮平台所承載 之物件，易出現高低起伏、劇烈晃動等位置不均之現象，極不利檢測作業 之實施’此係氣墊層中壓力分佈不均所導致。 有鑑於此，先前技術如中華民國專利公告號M288〇〇4、JApAN patent No.2002-3〇8422、中華民國專利公告號觀况8一般顯示，藉多孔性材料 之實施於氣室與氣孔交界位置處，可使工作物件在懸浮時較平整且不發生 垂墜的現象，抑或在通氣裝置設置一氣浮磚，該氣浮碑亦為多孔性材料， 如此可使位於輸送部内之玻璃基板在輸送過程中，不易直接與硬質物質接 6 200936475 觸故可降低破損率。 前案之設計關鍵在於多孔性材料的使用，如·、纖維、混泥土等材 料，相對於直式導管雖可使氣塾層壓力分佈較均勻，然而，多孔性材料價 格昂貴、承載能力極低、具污染、加工不易，且一旦供氣源不穩使承載物 - 件產生震触’其、'肖彌震盪能力(抗震性)不佳，不適用於檢測技術上。 目此，基於上述揭示的技藝中尚無-種高承載能力、高抗震性、不具 巧染、加工簡易且價格便宜之基板傳輸及檢測裝置，故迫切需要開發一種 ® 脑之氣浮平台。 【發明内容】 為解決既有氣浮平台之不足’本發明之主要目的在於提供一種創新進 氣結構之氣浮平台。其係在平台本體上_特狀進氣裝置及排氣裝置以 改變氣體進出喷嘴之型態’藉此改變·層流場的形式，並供以特定之供 氣源及特定排氣裝置，使氣塾層輯制均喊定，且具有快速消彌不穩 定氣體源造成承載物件震盪現象之目的。 © ..、、 為達到上述目的，本發明提出之創新進氣結構之氣浮平台係由平台本 體、配流板以及供排氣板由上而下依序組合而成，並附有特定的供氣源及 排氣裝置。該供氣源提供之正壓氣體由該供排氣板進入至配流板，再流經 .平台本體後進而導入氣墊層内藉其靜壓浮起承載物件，多餘氣體則將從附 有排氣緩衝氣袋結構之減導管最終由賊孔直接排人錢環境或由抽氣 裝置提供之負壓環境排出。其中平台本體包含至少一特殊進氣裝置，其分 別由進氣緩衝氣袋、導管則、節流孔及進氣導管由上而下加域形，供 7 200936475 應氣體可由該進氣導管進入，再流經緩衝氣袋形成氣墊；平台本體亦包含 - 至少一特殊排氣裝置，其分別由排氣緩衝氣袋及排氣導管所組成，氣墊層 内多餘氣體可由該緩衝氣袋進入，最終由排氣孔排出。 該氣浮平台附有一配流板，用以使進氣導管、排氣導管獲有較均勻之 工作流體。該配流板一側挖有進氣配槽及排氣配槽，其分別對應於平台本 . 體之進氣導管及排氣導管，該配槽底面鑽有至少一個連通管至配流板另外 一側，使該連通管連通於供排氣板之進、排氣氣室。 €> 雜浮平纟細有_供魏板’用喊健Λ連通管之卫作流體所受 之擾動，並簡化該供氣、排氣系統之實施。該供排氣板—側挖有若干氣室， 氣室底面鑽有至少-個孔洞至供排氣板另外一側，使該孔洞分別對應連接 於供氣源及特定排氣壓力環境。 藉由本發_新進氣結構之氣浮平台，可使承載物件受餅均勻穩的 氣塾流場’均勻穩定之氣塾流場可降低承载物件與平台表面碰撞之產生， 不易造成承載物件因摩擦損傷。再者，當不穩定供氣源產生之際，本發明 ©綱進氣結構之氣浮平台具有快速消彌不穩定氣體源造成承載物件震盡現 象’此高抗震性之特點可搭配取像裝置並用於產線之及時檢測機台。 底下藉由具體實施例配合所附的圖式詳加說明，以更容易瞭解本發明 之技術内容及特點。 【實施方式】 以下清參照聰圖絲㈣本發縣達成目的所使㈣技術手段而 下列所示圖式所列舉之實施例僅為輔助說明 ，以利貴審查委員瞭解，但本 8 200936475 案之技術手段並不限於所列舉圖式。 _ 本發明係相關於—種創新進氣結構之氣浮載台，以下配合參閱第1圖 轉4圖，係本發明之進氣結構之氣浮平台示意圖。其巾該創新進 氣、”。構之氣浮平口為、组合式結構，由上而下依序分別由一平台本體17， • 一配流板21以及一供排氣板31組合而成。 如第1_示’其中平台本體具有至少-特殊進氣裝置以及至少一特200936475 Di, invention description: [Technical field of invention] = 发 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The substrate air floating flat 纟 is provided to a specific air supply source and an exhaust device, and the exhaust device can be a vacuum pump or other device that can provide a negative pressure lower than the surface of the table or can help the atmosphere of the atmosphere, the navigation - The positive pressure air supply source and the service device, and the special air bag ejecting to effectively overcome the turbulent behavior caused by the unstable flow material, the bearing object can be stably supported. [Prior Art] The air-floating platform is extremely wide-ranging, and the glass panel, the color filter #, the crystal®, the circuit board, etc., are extremely sensitive to the static electricity generated in the processing process, which leads to work. The damage of the object reduces the yield of the product. Therefore, the application of the Weifu platform is often used to overcome the above problems, and its importance cannot be underestimated. The air intake device selected for the conventional air-floating platform is provided with a plurality of gas injection holes directly on the platform body, and the gas injection holes are formed by drilling and forming straight pipes. However, due to the improvement of product production efficiency and yield, the work items on the production line will be fully tested. However, the objects carried by the air floating platform of the design are prone to uneven position such as high and low undulations and severe swaying. Implementation of unfavorable inspection operations 'This is caused by uneven pressure distribution in the air cushion. In view of this, prior art such as the Republic of China Patent Bulletin No. M288〇〇4, JApAN patent No.2002-3〇8422, and the Republic of China Patent Bulletin No. 8 generally show that the implementation of porous materials is at the junction of the gas chamber and the pores. At the position, the working object can be flat and does not hang when suspended, or a gas floating brick is disposed in the venting device, and the gas floating monument is also a porous material, so that the glass substrate located in the conveying portion can be transported. In the process, it is not easy to directly connect with hard materials. 200936475 It can reduce the breakage rate. The key to the design of the previous case is the use of porous materials, such as fiber, concrete, etc., although the pressure distribution of the gas layer is relatively uniform compared to the straight pipe, however, the porous material is expensive and has a very low carrying capacity. It is not easy to be polluted and processed, and once the gas supply source is unstable, the load-piece will be shocked, and its 'Shaw shock capacity (shock resistance) is not good, and it is not suitable for detection technology. Therefore, based on the above-disclosed art, there is no substrate transfer and detection device with high load carrying capacity, high shock resistance, no smudged dyeing, simple processing, and low cost, so it is urgent to develop a ® brain air floating platform. SUMMARY OF THE INVENTION In order to solve the problem of the existing air floating platform, the main object of the present invention is to provide an air floating platform with an innovative intake structure. It is attached to the platform body _ special air intake device and exhaust device to change the type of gas inlet and outlet nozzles, thereby changing the form of the laminar flow field, and providing a specific supply source and a specific exhaust device. The gas-filled layer system is called, and it has the purpose of rapidly eliminating the unstable gas source and causing the shock of the bearing object. © .., , in order to achieve the above object, the air-floating platform of the innovative intake structure proposed by the present invention is composed of a platform body, a distribution plate and an air supply and exhaust plate from top to bottom in a sequence, and is provided with a specific supply. Air source and exhaust. The positive pressure gas supplied by the air supply source enters the distribution plate from the air supply and exhaust plate, and then flows through the platform body, and then is introduced into the air cushion layer to float the load bearing member by static pressure, and the excess gas will be exhausted from the exhaust gas. The reducing duct of the buffer air bag structure is finally discharged from the thief hole directly into the human money environment or by the negative pressure environment provided by the air suction device. The platform body comprises at least one special air intake device, which is respectively formed by an air intake cushion air bag, a duct, an orifice and an air inlet duct from top to bottom, and is supplied by the air intake duct. And flowing through the buffer air bag to form an air cushion; the platform body also includes at least one special exhaust device, which is respectively composed of an exhaust buffer air bag and an exhaust duct, and excess gas in the air cushion layer can be entered by the buffer air bag, and finally The vent hole is exhausted. The air floating platform is provided with a flow distribution plate for obtaining a relatively uniform working fluid for the intake duct and the exhaust duct. An air intake groove and an exhaust distribution groove are respectively dug on one side of the flow distribution plate, which respectively correspond to the intake pipe and the exhaust pipe of the platform body, and the bottom surface of the distribution groove is drilled with at least one communication pipe to the other side of the flow distribution plate The communication pipe is connected to the intake and exhaust air chambers of the air supply and exhaust plate. €> The floating floats are finely _ for the Wei board's use of the vibration of the connecting pipe, and simplify the implementation of the gas supply and exhaust system. The air supply and exhaust plate has a plurality of air chambers on the side, and at least one hole is drilled in the bottom surface of the air chamber to the other side of the air supply and exhaust plate, so that the holes are respectively connected to the air supply source and the specific exhaust pressure environment. With the air-floating platform of the new air intake structure, the load-bearing object can be evenly stabilized by the gas flow field of the cake. The uniform and stable gas flow field can reduce the collision between the load-bearing object and the platform surface, and it is not easy to cause damage to the load-bearing object due to friction. . Furthermore, when the unstable gas supply source is generated, the air-floating platform of the present invention has the function of quickly eliminating the unstable gas source and causing the shock of the load-bearing object. The characteristics of the high seismic resistance can be matched with the image capturing device. And used in the timely detection machine of the production line. The technical contents and features of the present invention will be more readily understood by the detailed description of the embodiments and the accompanying drawings. [Embodiment] The following is a reference to the technical means of Cong Tu Si (4) Benfa County's achievement of the purpose, and the following examples shown in the drawings are only supplementary explanations, so that the reviewers can understand, but the technology of this 200936475 Means are not limited to the illustrated figures. The invention relates to an air floating platform which is an innovative intake structure. The following is a schematic diagram of the air floating platform of the air intake structure of the present invention. The towel has the innovative intake air, and the air-floating port is a combined structure, which is composed of a platform body 17 , a distribution plate 21 and a supply and exhaust plate 31 from top to bottom. 1st - 'where the platform body has at least - a special air intake device and at least one special
殊排絲置’鋪殊職裝麵由緩衝氣袋⑷、導管則I 〇節流孔U及進氣導管n所由上而下加工成形，進氣緩衝氣袋⑷設置於 平本體上表面並銜接於台體表面18，係由台體表面18向平台本體ι?除料 而成。節流孔η幾何中心設置於進氣緩衝氣袋14a底面之幾何中心處，係 由進氣緩衝氣袋14a底面幾何中心處往平台本體17除料而成，該節流孔13 内徑小於緩衝氣袋14a之内徑。該進氣導管u由平台本體17下表面往平 台本體π除料而成，其幾何中心對準於節流孔13幾何中心且相互連通， 該魏導管11雜舰條錢緩衝錄14a及祕孔13之職之間。 © 該特殊排氣裝置則分別由排氣緩衝氣袋⑽及進排氣導管丨6所組成， 排氣緩衝氣袋14b設置於平本體上表面並讎於㈣表面18，係由台體表 面18向平台本體Π除料而成。排氣導管16幾何中心設置於排氣緩衝氣袋The special layout of the special layout is made up of a buffer air bag (4), a conduit, an I 〇 orifice U and an intake duct n, and the intake buffer air bag (4) is disposed on the upper surface of the flat body and It is connected to the surface 18 of the table body and is discharged from the surface 18 of the table body to the platform body ι. The geometric center of the orifice η is disposed at the geometric center of the bottom surface of the intake buffer air bag 14a, and is formed by the material center of the bottom surface of the intake buffer air bag 14a. The inner diameter of the throttle hole 13 is smaller than the buffer. The inner diameter of the air bag 14a. The air inlet duct u is formed by the lower surface of the platform body 17 to the platform body π, and its geometric center is aligned with the geometric center of the throttle hole 13 and communicates with each other. The Wei duct 11 is mixed with the cargo buffer 14a and the secret hole. Between the 13 positions. © The special exhaust device consists of an exhaust buffer air bag (10) and an intake and exhaust duct 丨6, respectively. The exhaust buffer air bag 14b is disposed on the upper surface of the flat body and is disposed on the surface of the (four) surface 18. The material is removed from the platform body. The geometric center of the exhaust duct 16 is disposed in the exhaust buffer air bag
Hb底面之幾何中心處，係由排氣緩衝氣袋⑽底面幾何中心處往平台本體 _ Η除料而姐成形至平台本體17下表面，該排氣導# 16咖、於排氣緩 - 衝氣袋14b之内徑。 如第2圖所示，該配流板21用以使進氣導管1卜排氣導管16入口處 9 200936475 獲有二次均勻化之氣體。該配流板21 —側挖有進氣配槽23及排氣配槽25 各分別對應於平台本體17之進氣導管11及排氣導管16，其槽寬分別等同 於該進氣導管11及排氣導管16之内徑大小。進氣配槽23及排氣配槽25 底面分別鑽有至少一個進氣連通管22及排氣連通管24至配流板21另外一 側’其進氣連通管22及排氣連通管24之内徑大小分別等同於進氣配槽23 及排氣配槽25槽寬，且進氣連通管22及排氣連通管24分別連通於供排氣 板31之進氣氣室33及排氣氣室35。 ® 如第3圖所示，該供排氣板31用以使進氣連通管22及排氣連通管24 獲有一次均勻化之氣體，以減小進出連通管之氣體承受不穩定壓力造成之 擾動’並有力簡化該供氣、排氣系統之實施。該供排氣板31 —側挖有若干 氣室，其中進氣氣室33及排氣氣室35各分別對應於進氣連通管22及排氣 連通管24,進氣氣室33及排氣氣室35底面分別鑽有至少一個供氣孔32及 排氣孔34至供排氣板31另外一側，使該供氣孔32及排氣孔34各分別對 應連接於供氣源及特定排氣壓力環境。 © 歸納以上所述，請參閱第4圖所示，供氣源41所供應之正壓氣體由該 供氣孔32進入進氣氣室33，使供應氣體可經一次均勻化再藉進氣連通管 22進入進氣配槽23，此經二次均勻化之供應氣體再經進氣導管丨丨，再通過 導管鰭片12形成之節流孔13以減少質量流率之消耗，最終由進氣緩衝氣 * 袋14a進而導入氣墊層内藉其靜壓浮起承載物件42。基於進氣緩衝氣袋14a 具有平衡氣墊層流阻與節流孔13流阻的功能，故承載物件42可以穩定受 到撐持。而氣墊層中多餘氣體則將從排氣之排氣緩衝氣袋14b往下流經拂 200936475 氣導管】6，其終端銜接於具有二次均勻之排氣配槽％，再藉排氣連通管Μ 將工作流體賊至具有—胡^之排減室％，祕鮮絲體將由排氣 孔34排入大氣環境或由抽氣裝置所提供之負麗境排出。同理，基於排氣 緩衝氣袋Mb具有平衡氣墊層流阻與排氣導管10流阻的功能，故承載物件 42可以穩定受到撐持。 其目的在使 不能以之限定 以上所述之實關鶴為朗本發明之技術思想及特點， 熟習此項賴之人士錢瞭穌翻之喊鱗以實施，去 200936475 【圖式簡單說明】 圖式說明： 第1圖 平台本體之立體局部剖面圖 第2圖 配流板之立體局部剖面圖 第3圖 供排氣板之立體局部剖面圖 第4圖 本發明正壓真空型基板氣浮平台之平面局部前視圖 圖示符號說明 〇 11 進氣導管； 12 導管鰭片； 13 節流孔； 14a 進氣緩衝氣袋； 14b 排氣緩衝氣袋； 15a 進氣氣袋壁； 15b 排氣氣袋壁； Ο 16 排氣導管； 17 平台本體； 18 台體表面； 21 配流板； - 22 進氣連通管； - 23 進氣配槽； 24 排氣配槽； 12 200936475 25 排氣連通管; 31 供排氣板； 32 供氣孔； 33 進氣氣室； 34 排氣孔； 35 排氣氣室； 41 供氣源； 42 承載物件； 43 抽氣裝置； 拾、 申請專利範圍The geometric center of the bottom surface of the Hb is formed by the geometric center of the bottom surface of the exhaust buffer air bag (10) toward the platform body _ Η, and the sister is formed to the lower surface of the platform body 17, the exhaust gas guide is exhausted. The inner diameter of the air bag 14b. As shown in Fig. 2, the flow distribution plate 21 is used to obtain a secondary homogenized gas at the inlet of the intake duct 1 and the exhaust duct 16 200936475. The flow distribution plate 21 is provided with an intake distribution groove 23 and an exhaust distribution groove 25 respectively corresponding to the intake duct 11 and the exhaust duct 16 of the platform body 17, respectively, and the groove width is equivalent to the intake duct 11 and the row, respectively. The inner diameter of the gas conduit 16. The bottom surface of the intake distribution groove 23 and the exhaust distribution groove 25 are respectively drilled with at least one intake communication pipe 22 and the exhaust communication pipe 24 to the other side of the distribution plate 21, and the inside of the intake communication pipe 22 and the exhaust communication pipe 24 The size of the diameter is equal to the slot width of the intake groove 23 and the exhaust groove 25, and the intake communication pipe 22 and the exhaust communication pipe 24 communicate with the intake air chamber 33 and the exhaust air chamber of the supply and exhaust plate 31, respectively. 35. As shown in Fig. 3, the air supply and exhaust plate 31 is used to obtain a uniform gas for the intake air communication pipe 22 and the exhaust gas communication pipe 24, so as to reduce the unstable pressure of the gas entering and exiting the communication pipe. Disturbing' and effectively simplifying the implementation of the gas supply and exhaust system. The air supply and exhaust plate 31 is laterally dug with a plurality of air chambers, wherein the intake air chamber 33 and the exhaust air chamber 35 respectively correspond to the intake communication tube 22 and the exhaust communication tube 24, the intake air chamber 33 and the exhaust gas. The bottom surface of the gas chamber 35 is drilled with at least one air supply hole 32 and the exhaust hole 34 to the other side of the air supply and exhaust plate 31, so that the air supply hole 32 and the air discharge hole 34 are respectively connected to the air supply source and the specific exhaust pressure. surroundings. © In summary, as shown in Fig. 4, the positive pressure gas supplied from the air supply source 41 enters the intake air chamber 33 from the air supply hole 32, so that the supply gas can be homogenized once and then the intake communication tube 22 enters the intake distribution tank 23, and the secondary homogenized supply gas passes through the intake duct 丨丨, and then passes through the orifice 13 formed by the conduit fin 12 to reduce the consumption of the mass flow rate, and finally by the intake buffer The gas bag 14a is further introduced into the air cushion layer to float the carrier member 42 by its static pressure. Since the intake buffer air bag 14a has a function of balancing the flow resistance of the air cushion layer and the flow resistance of the orifice 13, the carrier member 42 can be stably supported. The excess gas in the air cushion layer will flow downward from the exhaust buffer air bag 14b of the exhaust gas through the 拂200936475 air pipe]6, and its terminal is connected to the exhaust gas distribution tank having a second uniformity, and then the exhaust communication pipe Μ The working fluid thief will have a % of the discharge chamber, and the secret silk body will be discharged into the atmosphere by the vent hole 34 or discharged by the negative environment provided by the air suction device. Similarly, based on the exhaust buffer air bag Mb having the function of balancing the flow resistance of the air cushion layer and the flow resistance of the exhaust duct 10, the carrier member 42 can be stably supported. The purpose is to make it impossible to limit the above-mentioned practical Guanhe as the technical idea and characteristics of Langben's invention. Those who are familiar with the money have to turn the scales to implement it, go to 200936475 [Simplified illustration] Description: Fig. 1 is a three-dimensional partial sectional view of the platform body. Fig. 2 is a three-dimensional partial sectional view of the distribution plate. Fig. 3 is a three-dimensional partial sectional view of the exhaust plate. Fig. 4 is a plan view of the positive pressure vacuum type substrate air floating platform of the present invention Partial front view illustration symbol 〇11 intake duct; 12 duct fins; 13 orifices; 14a intake buffer air bag; 14b exhaust buffer air bag; 15a intake air bag wall; 15b exhaust air bag wall ; Ο 16 exhaust duct; 17 platform body; 18 platform surface; 21 distribution plate; - 22 intake communication pipe; - 23 intake distribution groove; 24 exhaust distribution groove; 12 200936475 25 exhaust communication pipe; Exhaust plate; 32 air supply hole; 33 intake air chamber; 34 exhaust hole; 35 exhaust air chamber; 41 air supply source; 42 load bearing device; 43 air pumping device;
1. 一種創新進氣結構氣浮平台，其係由平台本體、配流板以及供排氣板由 上而下依序組合而成。其中平台本體包含： 至少一特殊進氣裝置，其分別由進氣緩衝氣袋、導管鰭片、節流孔及 進氣導管由上而下加工成形。以及至少一特殊排氣裝置，其分別由排氣緩 © 衝氣袋及排氣導管由上而下加工成形。 2. 如申請專利範圍第1項所述之氣浮平台，其中進氣緩衝氣袋之形狀幾何 係以圓形製作。 3. 如申請專利範圍第1項所述之氣浮平台，其中進氣緩衝氣袋之内徑不同。 - 4.如申請專利範圍第1項所述之氣浮平台，其中進氣緩衝氣袋氣袋壁與台 - 體表面夾角範圍可從90到150度之間。 . 5. 如申請專利範圍第1項所述之氣浮平台，其中導管鰭片厚度至少1mm。 6. 如申請專利範圍第1項所述之氣浮平台，其中節流孔之内徑小於緩衝氣 131. An innovative air intake structure for air intake, which is composed of a platform body, a distribution plate and a supply and exhaust plate from top to bottom. The platform body comprises: at least one special air intake device, which is respectively formed from the upper and lower sides by an intake buffer air bag, a duct fin, an orifice and an intake duct. And at least one special exhaust device, which is respectively formed by the exhaust gas venting bag and the exhaust pipe from top to bottom. 2. The air flotation platform of claim 1, wherein the shape of the intake cushion air bag is made in a circle. 3. The air-floating platform according to claim 1, wherein the inner diameter of the intake buffer air bag is different. - 4. The air-floating platform according to claim 1, wherein the air-buffering air bag air bag wall and the table-body surface angle may range from 90 to 150 degrees. 5. The air flotation platform of claim 1, wherein the conduit fin has a thickness of at least 1 mm. 6. The air-floating platform according to claim 1, wherein the inner diameter of the orifice is smaller than the buffer gas.