CN109323988A - A kind of glass substrate detection method suitable for air-flotation system - Google Patents
A kind of glass substrate detection method suitable for air-flotation system Download PDFInfo
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- CN109323988A CN109323988A CN201811317601.XA CN201811317601A CN109323988A CN 109323988 A CN109323988 A CN 109323988A CN 201811317601 A CN201811317601 A CN 201811317601A CN 109323988 A CN109323988 A CN 109323988A
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- glass substrate
- pressure nozzle
- bearing plate
- air bearing
- camera
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of glass substrate detection methods suitable for air-flotation system.Should detection method includes the following steps: (1) by air bearing plate positive-pressure nozzle and negative pressure nozzle be set as interval lattice arrangement；(2) the negative pressure nozzle location along air bearing plate arranged askew is set as scan path；(3) light source is aimed downwardly the surface of the tested glass substrate carried by air bearing plate, carries out oblique scanning to tested glass substrate along scan path using camera as receiver, realizes the catoptric imaging of tested glass substrate different location.The present invention passes through design positive/negative-pressure nozzle arrangement mode and control camera scan path, so that scan path is detected along the trough that glass substrate vibrates always, to which the influence by the vibration of glass substrate to testing result is reduced to minimum, measurement accuracy has been correspondingly improved.
Description
Technical field
The present invention relates to precision engineering technical field more particularly to a kind of glass substrate detection sides suitable for air-flotation system
Method.
Background technique
Liquid crystal display is widely used in various fields such as mobile phone, computer, TVs, and the market space is huge.And glass
Substrate is the basic building block for constituting liquid crystal display, is one of the critical component of FPD industry.For the glass of glass substrate
Glass surface quality requirements must have ultraphotic cleanliness, and any 3 μm or more of scratch and dirt can all influence the aobvious of final display screen
Picture and the generation for leading to substandard products, thus, the transmission for glass substrate, most suitable scheme is using the non-of static pressure air-bearing technology
Contact carrying.The principle of non-contact carrying is: gas-pressurized via air floating platform surface throttle orifice flow out, air floating platform with
One layer of air film with certain rigidity is formed between glass substrate, utilizes the weight of air film supported glass substrate.Air bearing transmission fortune
Loading system exactly makes to be transmitted glass substrate using gas pressure to float, and lift of gas and glass substrate gravity are in equilibrium-like
State is the representative art of current advanced lines panel display screen assembly surface defect on-line checking.But when actually detected,
Because dispersing cloth, blow, the presence of gas absorption spray outlet pressure peak value, there is fluctuation in the air cushion of supporting glass panel.Work as glass
Glass substrate can generate corresponding dynamic deformation in air bearing mat exercises, show as fluctuating on the section in optical scanner path,
This fluctuation in the instantaneous velocity of each particle be it is unequal, the biggish local fluctuating error of speed is also larger.Existing skill
Art is all linear scanning path, and optical scanner point can traverse each point of above-mentioned perturbation waveform, the wave of each point from scan path
From the point of view of moving, scan path is not the smallest path of speed, therefore measurement error is larger.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of glass substrate detection methods suitable for air-flotation system.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is that, a kind of glass base suitable for air-flotation system
Board detecting method, comprising the following steps:
(1) by air bearing plate positive-pressure nozzle and negative pressure nozzle be set as interval lattice arrangement；
(2) the negative pressure nozzle location of arranged askew is set as scan path along air bearing plate；
(3) light source is aimed downwardly the surface of the tested glass substrate carried by air bearing plate, using camera as receiver edge
Scan path oblique scanning is carried out to tested glass substrate, realize the catoptric imaging of tested glass substrate different location.
As preferred:
Light source is laser.
Camera is linear array CCD camera.
The beneficial effects of the present invention are:
By design positive/negative-pressure nozzle arrangement mode and control camera scan path, so that scan path is always along glass
The trough of glass substrate vibration is detected, so that the influence by the vibration of glass substrate to testing result is reduced to minimum, accordingly
Ground improves measurement accuracy.
Detailed description of the invention
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
Fig. 1 is the glass substrate structure of the detecting device schematic diagram of the embodiment of the present invention.
Fig. 2 is the air bearing plate structural schematic diagram of the embodiment of the present invention.
Fig. 3 is the gas suspension transmission principle figure of the embodiment of the present invention.
Fig. 4 is the laser measurement defects of glass sheet schematic diagram of the embodiment of the present invention.
Fig. 5 is the laser measurement glass plate vibration trough schematic diagram of the embodiment of the present invention.
Fig. 6 is the gas molding pressure distribution schematic diagram of the embodiment of the present invention.
Marked in the figure: 1- light source, 2- camera, 3- air bearing plate, 4- glass substrate, 5- positive-pressure nozzle, 6- negative pressure nozzle, 7- are lacked
It falls into, 8- datum plane, 9- crossbeam, 10- column, 11- light source mounting base, 12- camera mounting base, 13- longitudinal motor, 14- is longitudinal
Guide rail, 15- cross motor, 16- cross slide way.
Specific embodiment
Fig. 1 is a kind of liquid crystal glass base detection device suitable for air-flotation system, by light source 1, camera 2, transmission mechanism and
Rack composition.
Transmission mechanism is led by light source mounting base 11, camera mounting base 12, mounting seat, sliding block, longitudinal motor 13 and longitudinal direction
Rail 14, cross motor 15 and cross slide way 16 form.
Light source mounting base 11 and camera mounting base 12 are fixedly mounted on the bottom surface of the same mounting seat, and mounting seat is by indulging
To motor driven, it is vertically moved along longitudinal rail.Longitudinal rail is connect by sliding block with cross slide way, cross motor 15
Driving sliding block drives longitudinal rail to move laterally along cross slide way 16.
Rack is the bracket of door shape, is made of crossbeam 9 and column 10.Its central post is fixedly connected with the both ends of crossbeam,
Crossbeam 9 is supported on to the top of column 10, the lower section of crossbeam 9 is then arranged in air bearing plate 3.
The positive-pressure nozzle 5 and negative pressure nozzle 6 (Fig. 2) by interval lattice arrangement are provided on air bearing plate 3.
Glass substrate 4 is located at the top of positive-pressure nozzle and negative pressure nozzle, and sprayed by positive-pressure nozzle 5 and negative pressure nozzle 6
Air-flow bearing.
Cross slide way 16 in transmission mechanism is fixedly installed in the side of two columns 10.
Light source mounting base 11 and camera mounting base 12 are attached separately to the bottom surface of mounting seat, and light source is mounted in light source mounting base
Above, camera is mounted in the upper surface of camera mounting base.Light source 1 and camera 2 are towards underlying air bearing plate 3.Camera mounting base
12 be multiple degrees of freedom adjustable base, by the shooting direction for adjusting the adjustable camera of camera mounting base.
In the present embodiment, light source 1 and camera 2 constitute the detector of a synchronizing moving, and wherein light source 1 uses laser
Device, camera 2 are linear array CCD camera, and longitudinal electric machine 13 and cross motor 15 are linear motor.
The glass substrate detection device course of work:
Light source and camera are fixed on above the same mounting seat, and are driven by longitudinal motor and made longitudinal direction along longitudinal rail
Mobile (i.e. Y-direction).Longitudinal rail is connect further through sliding block with cross slide way, and cross motor band movable slider is made along cross slide way
Transverse shifting (i.e. X-direction).An X/Y plane is constituted by longitudinal rail and cross slide way in this way, and by the same mounting seat
The detector that light source and camera above is constituted can make any movement in X/Y plane.
When installation, it is desirable that the X/Y plane that longitudinal rail and cross slide way are constituted is parallel to each other with air bearing plate.
The present embodiment working principle is as follows:
Measured object is glass substrate 4.
In Fig. 2, air film flow field is constructed by the way of positive-pressure nozzle 5 and the alternate arrangement of negative pressure nozzle 6 in air bearing plate.It is permanent
Body of calming the anger is flowed out via the throttle orifice on air floating platform surface, and one layer of air film is formed between air bearing plate platform and glass substrate 4, and
By the air film come the weight of bearing glass substrate 4.Because pressure is unevenly distributed in air film flow field, especially nozzle spray gas
It flows and the movement of impact and glass substrate on air film is formed to glass substrate 4, so that glass substrate is in pulsation lift of gas effect
Lower generation is vibrated and glass substrate is caused dynamically to deform.
Under the irradiation of light source 1, camera 2 is progressively scanned.In Fig. 4, camera 21 and camera 22 respectively indicate camera 2 in glass
The relative position of two sweep time points in 4 motion process of substrate.By observing imaging results, if defect in glass top surface,
The spacing that defect 7 and its shade are respectively imaged is larger, and as 7 position of defect is mobile to lower glass surface, defect 7 and its shade are each
Smaller and smaller from the spacing of imaging, until defect 7 appears in the lower surface of glass, two images are completely coincident.So according to lacking
The size for falling into 7 and its shadowgraph imaging spacing, can determine whether the position that defect 7 occurs in glass substrate 4.In air bearing transmission process
In, glass substrate vibrates, and the spacing of defect 7 is made to change, and generates detection error to original defect, will affect detection
As a result.
Vibration to analyze glass substrate below is how to influence testing result.The present embodiment uses laser triangulation
To realize the non-contact detecting of glass substrate defect.Laser triangulation is to be issued laser using geometric optical imaging principle
The emitted lens of light converge at testee surface and form incident luminous point, which converges at photodetection by receiving lens
Picture point is formed on device, can receive this information using the sensor (herein with linear array CCD camera) of location sensitive.When entering
It penetrates luminous point and when the vibration in opposite incident light axis direction, causes to be subjected to displacement on photosurface as luminous point with optical texture generation,
So as to cause the variation of photodetector output electric signal.The change in electric amount for representing image point displacement is examined with real defect
Signal is surveyed to mix through the flaw indication for after signal processing, becoming the measured target finally obtained.
Liquid-crystalline glasses plate thickness is generally 0.2~0.5mm, easily deforms in air bearing transmission process, and this
Glass substrate deformation is a dynamic deformation.Since positive/negative pressure venthole is interval lattice arrangement on air bearing plate 3, so that liquid
The lift of gas that crystal glass substrate is subject to not is uniform buoyancy, larger in the impact force that outlet hole site is subject to.In the gas of Fig. 6
Molding pressure distribution schematic diagram can be seen that centre as 6 position of negative pressure nozzle, and the inside air-breathing of intermediate negative pressure nozzle；On four angles
For the position of positive-pressure nozzle 5, the positive-pressure nozzle 5 on four angles is then blown outward, and liquid-crystalline glasses panel can also present with
The similar deformation in positive/negative-pressure nozzle arrangement position.When liquid-crystalline glasses panel is in gas suspension mat exercises, liquid-crystalline glasses panel
Deformation be dynamic, deformation schematic diagram such as Fig. 3 on the glass substrate section being perpendicularly to the direction of movement, wave crest corresponding points are
5 position of positive-pressure nozzle, the corresponding points of trough are 6 position of negative pressure nozzle.According to wave principle, in wave crest, trough
It is minimum to locate instantaneous velocity.
Since each point instantaneous velocity is unequal on entire waveform, trough instantaneous velocity is minimum, and equilbrium position is (i.e. in Fig. 5
The datum plane 8 that dotted line is drawn) instantaneous velocity is maximum, and the speed of each point is different on the liquid-crystalline glasses panel that camera detects
, it is corresponding due to vibrate caused by detection error it is also different, at trough error minimum, i.e., be exactly arranged on air bearing plate
Negative pressure nozzle 6 at.
When designing scan path, so that camera is along the shortest path between negative pressure nozzle adjacent on air bearing plate to quilt
It surveys glass baseplate surface to be scanned, forms the scanning along slanting negative pressure nozzle location on tested glass substrate
Path.
In the present embodiment, by controlling the motion profile of 2 scanning element of camera always along the negative pressure nozzle 6 on air bearing plate
The scan path that place's (i.e. at trough of glass substrate vibration deformation) is constituted is oblique to be scanned, so that test point falls in wave always
Paddy region, to realize that scanning imagery error is minimum.
The embodiments of the present invention described above are not intended to limit the scope of the present invention.It is any in the present invention
Spirit and principle within made modifications, equivalent substitutions and improvements etc., should be included in claim protection model of the invention
Within enclosing.
Claims (3)
1. a kind of glass substrate detection method suitable for air-flotation system, comprising the following steps:
(1) by air bearing plate positive-pressure nozzle and negative pressure nozzle be set as interval lattice arrangement；
(2) the negative pressure nozzle location of arranged askew is set as scan path along air bearing plate；
(3) light source is aimed downwardly the surface of the tested glass substrate carried by air bearing plate, using camera as receiver along sweeping
It retouches path and oblique scanning is carried out to tested glass substrate, realize the catoptric imaging of tested glass substrate different location.
2. glass substrate detection method according to claim 1, it is characterised in that: the light source is laser.
3. glass substrate detection method according to claim 1, it is characterised in that: the camera is linear array CCD camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811317601.XA CN109323988B (en) | 2018-11-06 | 2018-11-06 | Glass substrate detection method suitable for air floatation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811317601.XA CN109323988B (en) | 2018-11-06 | 2018-11-06 | Glass substrate detection method suitable for air floatation system |
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| Publication Number | Publication Date |
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| CN109323988A true CN109323988A (en) | 2019-02-12 |
| CN109323988B CN109323988B (en) | 2021-01-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811317601.XA Active CN109323988B (en) | 2018-11-06 | 2018-11-06 | Glass substrate detection method suitable for air floatation system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112212782A (en) * | 2019-06-25 | 2021-01-12 | 合肥欣奕华智能机器有限公司 | Glass substrate detection method, device and system |
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| TW200936475A (en) * | 2008-02-27 | 2009-09-01 | Jing-Tang Yang | Air floating table with novel injection pattern |
| JP2010281651A (en) * | 2009-06-04 | 2010-12-16 | Panasonic Corp | Optical inspection apparatus |
| KR20110097615A (en) * | 2010-02-24 | 2011-08-31 | 도쿄엘렉트론가부시키가이샤 | Substrate transfer apparatus |
| JP2012076877A (en) * | 2010-10-01 | 2012-04-19 | Nitto Denko Corp | Workpiece transport method and workpiece transport apparatus |
| CN205333544U (en) * | 2015-12-29 | 2016-06-22 | 郑州旭飞光电科技有限公司 | Glass substrate's granule checkout system |
| CN106938785A (en) * | 2017-02-28 | 2017-07-11 | 江苏科技大学 | A kind of glass substrate air-floating apparatus and detection method with shape changing detection function |
| CN107655788A (en) * | 2017-11-16 | 2018-02-02 | 合肥工业大学 | A kind of device for being used to measure glass substrate air-flotation system choke block Restriction Parameters |
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2018
- 2018-11-06 CN CN201811317601.XA patent/CN109323988B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200936475A (en) * | 2008-02-27 | 2009-09-01 | Jing-Tang Yang | Air floating table with novel injection pattern |
| JP2010281651A (en) * | 2009-06-04 | 2010-12-16 | Panasonic Corp | Optical inspection apparatus |
| KR20110097615A (en) * | 2010-02-24 | 2011-08-31 | 도쿄엘렉트론가부시키가이샤 | Substrate transfer apparatus |
| JP2012076877A (en) * | 2010-10-01 | 2012-04-19 | Nitto Denko Corp | Workpiece transport method and workpiece transport apparatus |
| CN205333544U (en) * | 2015-12-29 | 2016-06-22 | 郑州旭飞光电科技有限公司 | Glass substrate's granule checkout system |
| CN106938785A (en) * | 2017-02-28 | 2017-07-11 | 江苏科技大学 | A kind of glass substrate air-floating apparatus and detection method with shape changing detection function |
| CN107655788A (en) * | 2017-11-16 | 2018-02-02 | 合肥工业大学 | A kind of device for being used to measure glass substrate air-flotation system choke block Restriction Parameters |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112212782A (en) * | 2019-06-25 | 2021-01-12 | 合肥欣奕华智能机器有限公司 | Glass substrate detection method, device and system |
| CN112212782B (en) * | 2019-06-25 | 2023-01-17 | 合肥欣奕华智能机器股份有限公司 | Glass substrate detection method, device and system |
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| CN109323988B (en) | 2021-01-19 |
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