JPH0444428B2 - - Google Patents

Info

Publication number
JPH0444428B2
JPH0444428B2 JP60030653A JP3065385A JPH0444428B2 JP H0444428 B2 JPH0444428 B2 JP H0444428B2 JP 60030653 A JP60030653 A JP 60030653A JP 3065385 A JP3065385 A JP 3065385A JP H0444428 B2 JPH0444428 B2 JP H0444428B2
Authority
JP
Japan
Prior art keywords
region
substrate
trench
capacitor
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60030653A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6115362A (ja
Inventor
Chauuchun Ruu Nitsukii
Hyungu Ningu Tatsuku
Madeison Taaman Ruisu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS6115362A publication Critical patent/JPS6115362A/ja
Publication of JPH0444428B2 publication Critical patent/JPH0444428B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP60030653A 1984-06-29 1985-02-20 ダイナミツクｒａｍセル Granted JPS6115362A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US62651284A 1984-06-29 1984-06-29
US626512 1984-06-29

Publications (2)

Publication Number Publication Date
JPS6115362A JPS6115362A (ja) 1986-01-23
JPH0444428B2 true JPH0444428B2 (enrdf_load_stackoverflow) 1992-07-21

Family

ID=24510683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60030653A Granted JPS6115362A (ja) 1984-06-29 1985-02-20 ダイナミツクｒａｍセル

Country Status (2)

Country Link
JP (1) JPS6115362A (enrdf_load_stackoverflow)
CA (1) CA1228425A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801989A (en) * 1986-02-20 1989-01-31 Fujitsu Limited Dynamic random access memory having trench capacitor with polysilicon lined lower electrode
EP0236089B1 (en) * 1986-03-03 1992-08-05 Fujitsu Limited Dynamic random access memory having trench capacitor
JPH0691212B2 (ja) * 1986-10-07 1994-11-14 日本電気株式会社 半導体メモリ
JP2560307B2 (ja) * 1987-01-28 1996-12-04 日本電気株式会社 半導体記憶装置及びその製造方法
BR112013011355A2 (pt) 2010-11-10 2016-08-09 Honda Motor Co Ltd estrutura de piso automotivo

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188863A (en) * 1981-05-18 1982-11-19 Hitachi Ltd Field effect type semiconductor device
JPS5982761A (ja) * 1982-11-04 1984-05-12 Hitachi Ltd 半導体メモリ
JPS59110155A (ja) * 1982-12-16 1984-06-26 Nec Corp 半導体メモリセル

Also Published As

Publication number Publication date
JPS6115362A (ja) 1986-01-23
CA1228425A (en) 1987-10-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees