JPH0444217Y2 - - Google Patents

Info

Publication number
JPH0444217Y2
JPH0444217Y2 JP1985153309U JP15330985U JPH0444217Y2 JP H0444217 Y2 JPH0444217 Y2 JP H0444217Y2 JP 1985153309 U JP1985153309 U JP 1985153309U JP 15330985 U JP15330985 U JP 15330985U JP H0444217 Y2 JPH0444217 Y2 JP H0444217Y2
Authority
JP
Japan
Prior art keywords
workpiece
spinner
solvent
coating liquid
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985153309U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262869U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985153309U priority Critical patent/JPH0444217Y2/ja
Publication of JPS6262869U publication Critical patent/JPS6262869U/ja
Application granted granted Critical
Publication of JPH0444217Y2 publication Critical patent/JPH0444217Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1985153309U 1985-10-07 1985-10-07 Expired JPH0444217Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985153309U JPH0444217Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-10-07 1985-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985153309U JPH0444217Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-10-07 1985-10-07

Publications (2)

Publication Number Publication Date
JPS6262869U JPS6262869U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-18
JPH0444217Y2 true JPH0444217Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-10-19

Family

ID=31072075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985153309U Expired JPH0444217Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-10-07 1985-10-07

Country Status (1)

Country Link
JP (1) JPH0444217Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636843A (ja) * 1986-06-26 1988-01-12 Dainippon Screen Mfg Co Ltd 基板現像処理方法
JP2767308B2 (ja) * 1990-01-25 1998-06-18 富士写真フイルム株式会社 光情報記録媒体の製造方法
JP5029486B2 (ja) 2008-05-13 2012-09-19 東京エレクトロン株式会社 塗布装置、塗布方法及び記憶媒体

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57201564A (en) * 1981-06-01 1982-12-10 Dainippon Printing Co Ltd Coating method
JPS6074775U (ja) * 1984-09-13 1985-05-25 大日本スクリーン製造株式会社 回転式表面処理装置

Also Published As

Publication number Publication date
JPS6262869U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-18

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