JPH0442825B2 - - Google Patents
Info
- Publication number
- JPH0442825B2 JPH0442825B2 JP26023687A JP26023687A JPH0442825B2 JP H0442825 B2 JPH0442825 B2 JP H0442825B2 JP 26023687 A JP26023687 A JP 26023687A JP 26023687 A JP26023687 A JP 26023687A JP H0442825 B2 JPH0442825 B2 JP H0442825B2
- Authority
- JP
- Japan
- Prior art keywords
- test
- signal
- section
- marking
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 65
- 239000008188 pellet Substances 0.000 claims description 30
- 239000000523 sample Substances 0.000 claims description 23
- 239000004065 semiconductor Substances 0.000 claims description 17
- 230000002950 deficient Effects 0.000 claims description 10
- 239000003550 marker Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 13
- 230000007547 defect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26023687A JPH01101643A (ja) | 1987-10-14 | 1987-10-14 | 半導体用試験装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26023687A JPH01101643A (ja) | 1987-10-14 | 1987-10-14 | 半導体用試験装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01101643A JPH01101643A (ja) | 1989-04-19 |
| JPH0442825B2 true JPH0442825B2 (enrdf_load_stackoverflow) | 1992-07-14 |
Family
ID=17345243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26023687A Granted JPH01101643A (ja) | 1987-10-14 | 1987-10-14 | 半導体用試験装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01101643A (enrdf_load_stackoverflow) |
-
1987
- 1987-10-14 JP JP26023687A patent/JPH01101643A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01101643A (ja) | 1989-04-19 |
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