JPH01101643A - 半導体用試験装置 - Google Patents
半導体用試験装置Info
- Publication number
- JPH01101643A JPH01101643A JP26023687A JP26023687A JPH01101643A JP H01101643 A JPH01101643 A JP H01101643A JP 26023687 A JP26023687 A JP 26023687A JP 26023687 A JP26023687 A JP 26023687A JP H01101643 A JPH01101643 A JP H01101643A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- test
- marking
- pellets
- bad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 69
- 239000004065 semiconductor Substances 0.000 title claims abstract description 20
- 239000008188 pellet Substances 0.000 claims abstract description 37
- 239000000523 sample Substances 0.000 claims abstract description 29
- 230000007547 defect Effects 0.000 claims description 11
- 239000003550 marker Substances 0.000 claims description 7
- 238000004458 analytical method Methods 0.000 abstract description 3
- 238000007599 discharging Methods 0.000 abstract description 2
- 239000003990 capacitor Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 13
- 230000002950 deficient Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26023687A JPH01101643A (ja) | 1987-10-14 | 1987-10-14 | 半導体用試験装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26023687A JPH01101643A (ja) | 1987-10-14 | 1987-10-14 | 半導体用試験装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01101643A true JPH01101643A (ja) | 1989-04-19 |
| JPH0442825B2 JPH0442825B2 (enrdf_load_stackoverflow) | 1992-07-14 |
Family
ID=17345243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26023687A Granted JPH01101643A (ja) | 1987-10-14 | 1987-10-14 | 半導体用試験装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01101643A (enrdf_load_stackoverflow) |
-
1987
- 1987-10-14 JP JP26023687A patent/JPH01101643A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0442825B2 (enrdf_load_stackoverflow) | 1992-07-14 |
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