JPH0437614Y2 - - Google Patents
Info
- Publication number
- JPH0437614Y2 JPH0437614Y2 JP1987123060U JP12306087U JPH0437614Y2 JP H0437614 Y2 JPH0437614 Y2 JP H0437614Y2 JP 1987123060 U JP1987123060 U JP 1987123060U JP 12306087 U JP12306087 U JP 12306087U JP H0437614 Y2 JPH0437614 Y2 JP H0437614Y2
- Authority
- JP
- Japan
- Prior art keywords
- horizontal
- ceiling
- filter unit
- filter
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003749 cleanliness Effects 0.000 claims description 21
- 239000000047 product Substances 0.000 description 7
- 238000011109 contamination Methods 0.000 description 6
- 210000000744 eyelid Anatomy 0.000 description 6
- 238000007664 blowing Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987123060U JPH0437614Y2 (US20090163788A1-20090625-C00002.png) | 1987-08-11 | 1987-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987123060U JPH0437614Y2 (US20090163788A1-20090625-C00002.png) | 1987-08-11 | 1987-08-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6428928U JPS6428928U (US20090163788A1-20090625-C00002.png) | 1989-02-21 |
| JPH0437614Y2 true JPH0437614Y2 (US20090163788A1-20090625-C00002.png) | 1992-09-03 |
Family
ID=31371569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987123060U Expired JPH0437614Y2 (US20090163788A1-20090625-C00002.png) | 1987-08-11 | 1987-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437614Y2 (US20090163788A1-20090625-C00002.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2824626B1 (fr) | 2001-05-14 | 2004-04-16 | Pierre Bridenne | Procede et dispositif pour diffuser un flux de protection a l'egard d'une ambiance environnante |
| JP5626588B2 (ja) * | 2010-03-29 | 2014-11-19 | 清水建設株式会社 | 空調システム |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918230B2 (ja) * | 1976-10-29 | 1984-04-26 | 東芝テック株式会社 | シリアルプリンタ−駆動装置 |
| JPS6020050A (ja) * | 1983-07-15 | 1985-02-01 | Matsushita Electric Ind Co Ltd | 湯水混合装置 |
| JPS6161011B2 (US20090163788A1-20090625-C00002.png) * | 1977-12-02 | 1986-12-23 | Honeywell Inc |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57199026U (US20090163788A1-20090625-C00002.png) * | 1981-06-10 | 1982-12-17 | ||
| JPS5918230U (ja) * | 1982-07-28 | 1984-02-03 | 富士電機株式会社 | 空気拡散形高性能フイルタ |
| JPH039782Y2 (US20090163788A1-20090625-C00002.png) * | 1984-09-27 | 1991-03-12 |
-
1987
- 1987-08-11 JP JP1987123060U patent/JPH0437614Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918230B2 (ja) * | 1976-10-29 | 1984-04-26 | 東芝テック株式会社 | シリアルプリンタ−駆動装置 |
| JPS6161011B2 (US20090163788A1-20090625-C00002.png) * | 1977-12-02 | 1986-12-23 | Honeywell Inc | |
| JPS6020050A (ja) * | 1983-07-15 | 1985-02-01 | Matsushita Electric Ind Co Ltd | 湯水混合装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6428928U (US20090163788A1-20090625-C00002.png) | 1989-02-21 |
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