JPH0437423B2 - - Google Patents

Info

Publication number
JPH0437423B2
JPH0437423B2 JP28815285A JP28815285A JPH0437423B2 JP H0437423 B2 JPH0437423 B2 JP H0437423B2 JP 28815285 A JP28815285 A JP 28815285A JP 28815285 A JP28815285 A JP 28815285A JP H0437423 B2 JPH0437423 B2 JP H0437423B2
Authority
JP
Japan
Prior art keywords
general formula
formula
polymer
organic group
resistant material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28815285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62145239A (ja
Inventor
Shigeru Kubota
Norimoto Moriwaki
Torahiko Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP28815285A priority Critical patent/JPS62145239A/ja
Publication of JPS62145239A publication Critical patent/JPS62145239A/ja
Publication of JPH0437423B2 publication Critical patent/JPH0437423B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP28815285A 1985-12-19 1985-12-19 ポジ型感光性耐熱材料 Granted JPS62145239A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28815285A JPS62145239A (ja) 1985-12-19 1985-12-19 ポジ型感光性耐熱材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28815285A JPS62145239A (ja) 1985-12-19 1985-12-19 ポジ型感光性耐熱材料

Publications (2)

Publication Number Publication Date
JPS62145239A JPS62145239A (ja) 1987-06-29
JPH0437423B2 true JPH0437423B2 (enrdf_load_html_response) 1992-06-19

Family

ID=17726474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28815285A Granted JPS62145239A (ja) 1985-12-19 1985-12-19 ポジ型感光性耐熱材料

Country Status (1)

Country Link
JP (1) JPS62145239A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5614354A (en) * 1993-02-03 1997-03-25 Toray Industries, Inc. Method of forming positive polyimide patterns
EP1995635A4 (en) 2006-03-16 2011-03-30 Asahi Glass Co Ltd NEGATIVE LIGHT-SENSITIVE FLUORATED AROMATIC RESIN COMPOSITION
TW202208510A (zh) * 2020-06-23 2022-03-01 日商富士軟片股份有限公司 硬化性樹脂組成物、硬化膜、積層體、硬化膜的製造方法、半導體元件及熱硬化性樹脂

Also Published As

Publication number Publication date
JPS62145239A (ja) 1987-06-29

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