JPH0437400B2 - - Google Patents

Info

Publication number
JPH0437400B2
JPH0437400B2 JP57116078A JP11607882A JPH0437400B2 JP H0437400 B2 JPH0437400 B2 JP H0437400B2 JP 57116078 A JP57116078 A JP 57116078A JP 11607882 A JP11607882 A JP 11607882A JP H0437400 B2 JPH0437400 B2 JP H0437400B2
Authority
JP
Japan
Prior art keywords
vacuum
degree
tube
beam irradiation
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57116078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS596000A (ja
Inventor
Kenichi Mizusawa
Shuichi Taniguchi
Masaru Hamano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin High Voltage Co Ltd
Original Assignee
Nissin High Voltage Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin High Voltage Co Ltd filed Critical Nissin High Voltage Co Ltd
Priority to JP57116078A priority Critical patent/JPS596000A/ja
Publication of JPS596000A publication Critical patent/JPS596000A/ja
Publication of JPH0437400B2 publication Critical patent/JPH0437400B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57116078A 1982-07-02 1982-07-02 電子線照射装置のエ−ジング制御方法 Granted JPS596000A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57116078A JPS596000A (ja) 1982-07-02 1982-07-02 電子線照射装置のエ−ジング制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57116078A JPS596000A (ja) 1982-07-02 1982-07-02 電子線照射装置のエ−ジング制御方法

Publications (2)

Publication Number Publication Date
JPS596000A JPS596000A (ja) 1984-01-12
JPH0437400B2 true JPH0437400B2 (enExample) 1992-06-19

Family

ID=14678161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57116078A Granted JPS596000A (ja) 1982-07-02 1982-07-02 電子線照射装置のエ−ジング制御方法

Country Status (1)

Country Link
JP (1) JPS596000A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013235706A (ja) * 2012-05-08 2013-11-21 Toshiba Corp 加速器の制御装置およびその制御方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737875Y2 (enExample) * 1977-01-27 1982-08-20

Also Published As

Publication number Publication date
JPS596000A (ja) 1984-01-12

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