JPS596000A - 電子線照射装置のエ−ジング制御方法 - Google Patents

電子線照射装置のエ−ジング制御方法

Info

Publication number
JPS596000A
JPS596000A JP57116078A JP11607882A JPS596000A JP S596000 A JPS596000 A JP S596000A JP 57116078 A JP57116078 A JP 57116078A JP 11607882 A JP11607882 A JP 11607882A JP S596000 A JPS596000 A JP S596000A
Authority
JP
Japan
Prior art keywords
beam irradiation
electron beam
vacuum
control
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57116078A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0437400B2 (enExample
Inventor
水沢　健一
谷口　周一
浜野　勝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin High Voltage Co Ltd
Original Assignee
Nissin High Voltage Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin High Voltage Co Ltd filed Critical Nissin High Voltage Co Ltd
Priority to JP57116078A priority Critical patent/JPS596000A/ja
Publication of JPS596000A publication Critical patent/JPS596000A/ja
Publication of JPH0437400B2 publication Critical patent/JPH0437400B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57116078A 1982-07-02 1982-07-02 電子線照射装置のエ−ジング制御方法 Granted JPS596000A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57116078A JPS596000A (ja) 1982-07-02 1982-07-02 電子線照射装置のエ−ジング制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57116078A JPS596000A (ja) 1982-07-02 1982-07-02 電子線照射装置のエ−ジング制御方法

Publications (2)

Publication Number Publication Date
JPS596000A true JPS596000A (ja) 1984-01-12
JPH0437400B2 JPH0437400B2 (enExample) 1992-06-19

Family

ID=14678161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57116078A Granted JPS596000A (ja) 1982-07-02 1982-07-02 電子線照射装置のエ−ジング制御方法

Country Status (1)

Country Link
JP (1) JPS596000A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013235706A (ja) * 2012-05-08 2013-11-21 Toshiba Corp 加速器の制御装置およびその制御方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53103995U (enExample) * 1977-01-27 1978-08-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53103995U (enExample) * 1977-01-27 1978-08-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013235706A (ja) * 2012-05-08 2013-11-21 Toshiba Corp 加速器の制御装置およびその制御方法

Also Published As

Publication number Publication date
JPH0437400B2 (enExample) 1992-06-19

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