JPH0323304Y2 - - Google Patents
Info
- Publication number
- JPH0323304Y2 JPH0323304Y2 JP14560285U JP14560285U JPH0323304Y2 JP H0323304 Y2 JPH0323304 Y2 JP H0323304Y2 JP 14560285 U JP14560285 U JP 14560285U JP 14560285 U JP14560285 U JP 14560285U JP H0323304 Y2 JPH0323304 Y2 JP H0323304Y2
- Authority
- JP
- Japan
- Prior art keywords
- reflected power
- microwave
- plasma generation
- plasma
- meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000032258 transport Effects 0.000 claims description 8
- 230000010355 oscillation Effects 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14560285U JPH0323304Y2 (enExample) | 1985-09-24 | 1985-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14560285U JPH0323304Y2 (enExample) | 1985-09-24 | 1985-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6256137U JPS6256137U (enExample) | 1987-04-07 |
| JPH0323304Y2 true JPH0323304Y2 (enExample) | 1991-05-21 |
Family
ID=31057294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14560285U Expired JPH0323304Y2 (enExample) | 1985-09-24 | 1985-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323304Y2 (enExample) |
-
1985
- 1985-09-24 JP JP14560285U patent/JPH0323304Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6256137U (enExample) | 1987-04-07 |
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