JPH0437293Y2 - - Google Patents
Info
- Publication number
- JPH0437293Y2 JPH0437293Y2 JP4858186U JP4858186U JPH0437293Y2 JP H0437293 Y2 JPH0437293 Y2 JP H0437293Y2 JP 4858186 U JP4858186 U JP 4858186U JP 4858186 U JP4858186 U JP 4858186U JP H0437293 Y2 JPH0437293 Y2 JP H0437293Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- master
- substrate holder
- holder
- master substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 238
- 238000007789 sealing Methods 0.000 claims description 23
- 238000000926 separation method Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4858186U JPH0437293Y2 (enrdf_load_stackoverflow) | 1986-03-31 | 1986-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4858186U JPH0437293Y2 (enrdf_load_stackoverflow) | 1986-03-31 | 1986-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62161326U JPS62161326U (enrdf_load_stackoverflow) | 1987-10-14 |
| JPH0437293Y2 true JPH0437293Y2 (enrdf_load_stackoverflow) | 1992-09-02 |
Family
ID=30870244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4858186U Expired JPH0437293Y2 (enrdf_load_stackoverflow) | 1986-03-31 | 1986-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437293Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-03-31 JP JP4858186U patent/JPH0437293Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62161326U (enrdf_load_stackoverflow) | 1987-10-14 |
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