JPS62161326U - - Google Patents

Info

Publication number
JPS62161326U
JPS62161326U JP4858186U JP4858186U JPS62161326U JP S62161326 U JPS62161326 U JP S62161326U JP 4858186 U JP4858186 U JP 4858186U JP 4858186 U JP4858186 U JP 4858186U JP S62161326 U JPS62161326 U JP S62161326U
Authority
JP
Japan
Prior art keywords
substrate
master
substrate holder
transfer target
master substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4858186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0437293Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4858186U priority Critical patent/JPH0437293Y2/ja
Publication of JPS62161326U publication Critical patent/JPS62161326U/ja
Application granted granted Critical
Publication of JPH0437293Y2 publication Critical patent/JPH0437293Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Manufacturing Optical Record Carriers (AREA)
JP4858186U 1986-03-31 1986-03-31 Expired JPH0437293Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4858186U JPH0437293Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4858186U JPH0437293Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Publications (2)

Publication Number Publication Date
JPS62161326U true JPS62161326U (enrdf_load_stackoverflow) 1987-10-14
JPH0437293Y2 JPH0437293Y2 (enrdf_load_stackoverflow) 1992-09-02

Family

ID=30870244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4858186U Expired JPH0437293Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPH0437293Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0437293Y2 (enrdf_load_stackoverflow) 1992-09-02

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