JPS6279875U - - Google Patents

Info

Publication number
JPS6279875U
JPS6279875U JP16824285U JP16824285U JPS6279875U JP S6279875 U JPS6279875 U JP S6279875U JP 16824285 U JP16824285 U JP 16824285U JP 16824285 U JP16824285 U JP 16824285U JP S6279875 U JPS6279875 U JP S6279875U
Authority
JP
Japan
Prior art keywords
wall
faces
reaction chamber
registration request
quartz glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16824285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16824285U priority Critical patent/JPS6279875U/ja
Publication of JPS6279875U publication Critical patent/JPS6279875U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP16824285U 1985-10-31 1985-10-31 Pending JPS6279875U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16824285U JPS6279875U (enrdf_load_stackoverflow) 1985-10-31 1985-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16824285U JPS6279875U (enrdf_load_stackoverflow) 1985-10-31 1985-10-31

Publications (1)

Publication Number Publication Date
JPS6279875U true JPS6279875U (enrdf_load_stackoverflow) 1987-05-21

Family

ID=31100936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16824285U Pending JPS6279875U (enrdf_load_stackoverflow) 1985-10-31 1985-10-31

Country Status (1)

Country Link
JP (1) JPS6279875U (enrdf_load_stackoverflow)

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