JPH0436236Y2 - - Google Patents

Info

Publication number
JPH0436236Y2
JPH0436236Y2 JP1987124475U JP12447587U JPH0436236Y2 JP H0436236 Y2 JPH0436236 Y2 JP H0436236Y2 JP 1987124475 U JP1987124475 U JP 1987124475U JP 12447587 U JP12447587 U JP 12447587U JP H0436236 Y2 JPH0436236 Y2 JP H0436236Y2
Authority
JP
Japan
Prior art keywords
adsorption layer
temperature
adsorption
layer
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987124475U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6430691U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987124475U priority Critical patent/JPH0436236Y2/ja
Publication of JPS6430691U publication Critical patent/JPS6430691U/ja
Application granted granted Critical
Publication of JPH0436236Y2 publication Critical patent/JPH0436236Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
JP1987124475U 1987-08-14 1987-08-14 Expired JPH0436236Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987124475U JPH0436236Y2 (en:Method) 1987-08-14 1987-08-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987124475U JPH0436236Y2 (en:Method) 1987-08-14 1987-08-14

Publications (2)

Publication Number Publication Date
JPS6430691U JPS6430691U (en:Method) 1989-02-27
JPH0436236Y2 true JPH0436236Y2 (en:Method) 1992-08-26

Family

ID=31374239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987124475U Expired JPH0436236Y2 (en:Method) 1987-08-14 1987-08-14

Country Status (1)

Country Link
JP (1) JPH0436236Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4233866B2 (ja) 2002-12-27 2009-03-04 三菱重工業株式会社 印刷機の廃液再生装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818239B2 (ja) * 1978-06-15 1983-04-12 松下電器産業株式会社 製図板

Also Published As

Publication number Publication date
JPS6430691U (en:Method) 1989-02-27

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