JPS6430691U - - Google Patents

Info

Publication number
JPS6430691U
JPS6430691U JP12447587U JP12447587U JPS6430691U JP S6430691 U JPS6430691 U JP S6430691U JP 12447587 U JP12447587 U JP 12447587U JP 12447587 U JP12447587 U JP 12447587U JP S6430691 U JPS6430691 U JP S6430691U
Authority
JP
Japan
Prior art keywords
temperature
adsorption layer
heat generating
layer
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12447587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0436236Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987124475U priority Critical patent/JPH0436236Y2/ja
Publication of JPS6430691U publication Critical patent/JPS6430691U/ja
Application granted granted Critical
Publication of JPH0436236Y2 publication Critical patent/JPH0436236Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
JP1987124475U 1987-08-14 1987-08-14 Expired JPH0436236Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987124475U JPH0436236Y2 (en:Method) 1987-08-14 1987-08-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987124475U JPH0436236Y2 (en:Method) 1987-08-14 1987-08-14

Publications (2)

Publication Number Publication Date
JPS6430691U true JPS6430691U (en:Method) 1989-02-27
JPH0436236Y2 JPH0436236Y2 (en:Method) 1992-08-26

Family

ID=31374239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987124475U Expired JPH0436236Y2 (en:Method) 1987-08-14 1987-08-14

Country Status (1)

Country Link
JP (1) JPH0436236Y2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7472651B2 (en) 2002-12-27 2009-01-06 Mitsubishi Heavy Industries, Ltd. Waste liquid regenerator of printing machine

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163118A (en) * 1978-06-15 1979-12-25 Matsushita Electric Industrial Co Ltd Drafting board

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163118A (en) * 1978-06-15 1979-12-25 Matsushita Electric Industrial Co Ltd Drafting board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7472651B2 (en) 2002-12-27 2009-01-06 Mitsubishi Heavy Industries, Ltd. Waste liquid regenerator of printing machine

Also Published As

Publication number Publication date
JPH0436236Y2 (en:Method) 1992-08-26

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