JPH0432457B2 - - Google Patents

Info

Publication number
JPH0432457B2
JPH0432457B2 JP61189923A JP18992386A JPH0432457B2 JP H0432457 B2 JPH0432457 B2 JP H0432457B2 JP 61189923 A JP61189923 A JP 61189923A JP 18992386 A JP18992386 A JP 18992386A JP H0432457 B2 JPH0432457 B2 JP H0432457B2
Authority
JP
Japan
Prior art keywords
link
shaft
drive
chuck
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61189923A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6346651A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61189923A priority Critical patent/JPS6346651A/ja
Priority to US07/085,071 priority patent/US4868805A/en
Publication of JPS6346651A publication Critical patent/JPS6346651A/ja
Publication of JPH0432457B2 publication Critical patent/JPH0432457B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
JP61189923A 1986-08-13 1986-08-13 チヤツク部の駆動装置 Granted JPS6346651A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61189923A JPS6346651A (ja) 1986-08-13 1986-08-13 チヤツク部の駆動装置
US07/085,071 US4868805A (en) 1986-08-13 1987-08-13 Inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61189923A JPS6346651A (ja) 1986-08-13 1986-08-13 チヤツク部の駆動装置

Publications (2)

Publication Number Publication Date
JPS6346651A JPS6346651A (ja) 1988-02-27
JPH0432457B2 true JPH0432457B2 (enExample) 1992-05-29

Family

ID=16249469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61189923A Granted JPS6346651A (ja) 1986-08-13 1986-08-13 チヤツク部の駆動装置

Country Status (1)

Country Link
JP (1) JPS6346651A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002208134A (ja) * 2001-01-09 2002-07-26 Nakamura Tome Precision Ind Co Ltd ディスク基板の回転把持装置

Also Published As

Publication number Publication date
JPS6346651A (ja) 1988-02-27

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Legal Events

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LAPS Cancellation because of no payment of annual fees