JPS6346651A - チヤツク部の駆動装置 - Google Patents

チヤツク部の駆動装置

Info

Publication number
JPS6346651A
JPS6346651A JP61189923A JP18992386A JPS6346651A JP S6346651 A JPS6346651 A JP S6346651A JP 61189923 A JP61189923 A JP 61189923A JP 18992386 A JP18992386 A JP 18992386A JP S6346651 A JPS6346651 A JP S6346651A
Authority
JP
Japan
Prior art keywords
link
drive shaft
shaft
chuck
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61189923A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0432457B2 (enExample
Inventor
Toshiharu Kogure
小榑　利春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Priority to JP61189923A priority Critical patent/JPS6346651A/ja
Priority to US07/085,071 priority patent/US4868805A/en
Publication of JPS6346651A publication Critical patent/JPS6346651A/ja
Publication of JPH0432457B2 publication Critical patent/JPH0432457B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
JP61189923A 1986-08-13 1986-08-13 チヤツク部の駆動装置 Granted JPS6346651A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61189923A JPS6346651A (ja) 1986-08-13 1986-08-13 チヤツク部の駆動装置
US07/085,071 US4868805A (en) 1986-08-13 1987-08-13 Inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61189923A JPS6346651A (ja) 1986-08-13 1986-08-13 チヤツク部の駆動装置

Publications (2)

Publication Number Publication Date
JPS6346651A true JPS6346651A (ja) 1988-02-27
JPH0432457B2 JPH0432457B2 (enExample) 1992-05-29

Family

ID=16249469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61189923A Granted JPS6346651A (ja) 1986-08-13 1986-08-13 チヤツク部の駆動装置

Country Status (1)

Country Link
JP (1) JPS6346651A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002208134A (ja) * 2001-01-09 2002-07-26 Nakamura Tome Precision Ind Co Ltd ディスク基板の回転把持装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002208134A (ja) * 2001-01-09 2002-07-26 Nakamura Tome Precision Ind Co Ltd ディスク基板の回転把持装置

Also Published As

Publication number Publication date
JPH0432457B2 (enExample) 1992-05-29

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Legal Events

Date Code Title Description
S533 Written request for registration of change of name

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LAPS Cancellation because of no payment of annual fees