JPH0429581Y2 - - Google Patents
Info
- Publication number
- JPH0429581Y2 JPH0429581Y2 JP1987105920U JP10592087U JPH0429581Y2 JP H0429581 Y2 JPH0429581 Y2 JP H0429581Y2 JP 1987105920 U JP1987105920 U JP 1987105920U JP 10592087 U JP10592087 U JP 10592087U JP H0429581 Y2 JPH0429581 Y2 JP H0429581Y2
- Authority
- JP
- Japan
- Prior art keywords
- hall element
- magnetic
- semiconductor film
- substrate
- predetermined pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 51
- 239000000758 substrate Substances 0.000 claims description 42
- 230000004907 flux Effects 0.000 claims description 18
- 239000000696 magnetic material Substances 0.000 claims description 18
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 description 59
- 229910000859 α-Fe Inorganic materials 0.000 description 17
- 239000010409 thin film Substances 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 9
- 239000012790 adhesive layer Substances 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 230000005415 magnetization Effects 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 239000000470 constituent Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229910000673 Indium arsenide Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 3
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 3
- 230000005389 magnetism Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 150000002505 iron Chemical class 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 230000005355 Hall effect Effects 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Hall/Mr Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987105920U JPH0429581Y2 (enrdf_load_html_response) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987105920U JPH0429581Y2 (enrdf_load_html_response) | 1987-07-10 | 1987-07-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6411561U JPS6411561U (enrdf_load_html_response) | 1989-01-20 |
| JPH0429581Y2 true JPH0429581Y2 (enrdf_load_html_response) | 1992-07-17 |
Family
ID=31338965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987105920U Expired JPH0429581Y2 (enrdf_load_html_response) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429581Y2 (enrdf_load_html_response) |
-
1987
- 1987-07-10 JP JP1987105920U patent/JPH0429581Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6411561U (enrdf_load_html_response) | 1989-01-20 |
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