JPH0428144B2 - - Google Patents
Info
- Publication number
- JPH0428144B2 JPH0428144B2 JP59177803A JP17780384A JPH0428144B2 JP H0428144 B2 JPH0428144 B2 JP H0428144B2 JP 59177803 A JP59177803 A JP 59177803A JP 17780384 A JP17780384 A JP 17780384A JP H0428144 B2 JPH0428144 B2 JP H0428144B2
- Authority
- JP
- Japan
- Prior art keywords
- forming
- semiconductor substrate
- layer
- deep trap
- layer containing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59177803A JPS6155938A (ja) | 1984-08-27 | 1984-08-27 | 電子素子の分離法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59177803A JPS6155938A (ja) | 1984-08-27 | 1984-08-27 | 電子素子の分離法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6155938A JPS6155938A (ja) | 1986-03-20 |
| JPH0428144B2 true JPH0428144B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-05-13 |
Family
ID=16037358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59177803A Granted JPS6155938A (ja) | 1984-08-27 | 1984-08-27 | 電子素子の分離法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6155938A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01222761A (ja) * | 1988-03-02 | 1989-09-06 | Toukaiku Suisan Kenkyu Shocho | 晒し肉の製造方法 |
| US5196221A (en) * | 1990-02-08 | 1993-03-23 | Rutgers University | Process for inhibiting the growth of bacteria on seafood |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4837232A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1971-09-15 | 1973-06-01 | ||
| JPS5658226A (en) * | 1979-10-17 | 1981-05-21 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS5662882A (en) * | 1979-10-30 | 1981-05-29 | Agency Of Ind Science & Technol | Feeding of raw material to pyrolysis plant and its device |
| JPS57177537A (en) * | 1981-04-24 | 1982-11-01 | Matsushita Electric Ind Co Ltd | Isolation of semiconductor element |
| JPS5860557A (ja) * | 1981-10-06 | 1983-04-11 | Nec Corp | 砒化ガリウム高抵抗層形成方法 |
-
1984
- 1984-08-27 JP JP59177803A patent/JPS6155938A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6155938A (ja) | 1986-03-20 |