JPH0427684B2 - - Google Patents

Info

Publication number
JPH0427684B2
JPH0427684B2 JP58067031A JP6703183A JPH0427684B2 JP H0427684 B2 JPH0427684 B2 JP H0427684B2 JP 58067031 A JP58067031 A JP 58067031A JP 6703183 A JP6703183 A JP 6703183A JP H0427684 B2 JPH0427684 B2 JP H0427684B2
Authority
JP
Japan
Prior art keywords
layer
resist
gold
composite material
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58067031A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59193455A (ja
Inventor
Shuzo Hatsutori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Shinku Gijutsu KK filed Critical Nihon Shinku Gijutsu KK
Priority to JP58067031A priority Critical patent/JPS59193455A/ja
Publication of JPS59193455A publication Critical patent/JPS59193455A/ja
Publication of JPH0427684B2 publication Critical patent/JPH0427684B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP58067031A 1983-04-18 1983-04-18 Ｘ線リソグラフイ−用マスクの製造法 Granted JPS59193455A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58067031A JPS59193455A (ja) 1983-04-18 1983-04-18 Ｘ線リソグラフイ−用マスクの製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58067031A JPS59193455A (ja) 1983-04-18 1983-04-18 Ｘ線リソグラフイ−用マスクの製造法

Publications (2)

Publication Number Publication Date
JPS59193455A JPS59193455A (ja) 1984-11-02
JPH0427684B2 true JPH0427684B2 (enrdf_load_stackoverflow) 1992-05-12

Family

ID=13333096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58067031A Granted JPS59193455A (ja) 1983-04-18 1983-04-18 Ｘ線リソグラフイ−用マスクの製造法

Country Status (1)

Country Link
JP (1) JPS59193455A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022145143A1 (ja) 2020-12-28 2022-07-07 日本電気株式会社 情報処理システム、情報処理装置、情報処理方法及び記録媒体

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07104594B2 (ja) * 1986-11-29 1995-11-13 新技術開発事業団 光リソグラフイ−用マスク及びその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541625A (en) * 1977-06-06 1979-01-08 Mitsubishi Electric Corp Electrostatic recording head pressing mechanism
JPS54157277A (en) * 1978-06-01 1979-12-12 Nippon Electric Co Method of printed board for microwave

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022145143A1 (ja) 2020-12-28 2022-07-07 日本電気株式会社 情報処理システム、情報処理装置、情報処理方法及び記録媒体

Also Published As

Publication number Publication date
JPS59193455A (ja) 1984-11-02

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