JPH04269649A - ガスセンサの調製方法 - Google Patents
ガスセンサの調製方法Info
- Publication number
- JPH04269649A JPH04269649A JP30214591A JP30214591A JPH04269649A JP H04269649 A JPH04269649 A JP H04269649A JP 30214591 A JP30214591 A JP 30214591A JP 30214591 A JP30214591 A JP 30214591A JP H04269649 A JPH04269649 A JP H04269649A
- Authority
- JP
- Japan
- Prior art keywords
- gas sensor
- gas
- preparing
- sensing layer
- catalyst
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 26
- 239000003054 catalyst Substances 0.000 claims abstract description 32
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- 150000003839 salts Chemical class 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims description 16
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 8
- 239000010408 film Substances 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 abstract description 10
- 230000035945 sensitivity Effects 0.000 abstract description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 230000003197 catalytic effect Effects 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 71
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 6
- 229910021529 ammonia Inorganic materials 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 5
- 229910001887 tin oxide Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical compound [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910006854 SnOx Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910001863 barium hydroxide Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19904038140 DE4038140A1 (de) | 1990-11-30 | 1990-11-30 | Verfahren zum herstellen eines gassensors |
| DE40381404 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04269649A true JPH04269649A (ja) | 1992-09-25 |
Family
ID=6419250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30214591A Pending JPH04269649A (ja) | 1990-11-30 | 1991-11-18 | ガスセンサの調製方法 |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPH04269649A (enExample) |
| CA (1) | CA2053049A1 (enExample) |
| DE (1) | DE4038140A1 (enExample) |
| DK (1) | DK190091A (enExample) |
| FR (1) | FR2670012A1 (enExample) |
| GB (1) | GB2250823A (enExample) |
| NL (1) | NL9101879A (enExample) |
| SE (1) | SE9103017L (enExample) |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1116943A (en) * | 1964-08-21 | 1968-06-12 | Johnson Matthey Co Ltd | Improvements in and relating to catalytic reactions and a catalyst for use therein |
| GB1345067A (enExample) * | 1970-12-17 | 1974-01-30 | ||
| JPS5118262A (en) * | 1974-08-06 | 1976-02-13 | Japan Gasoline | Haigasuchuno chitsusosankabutsuno jokyohoho |
| US4197089A (en) * | 1975-12-22 | 1980-04-08 | Ambac Industries, Incorporated | Reducing gas sensor |
| JPS5395097A (en) * | 1977-01-31 | 1978-08-19 | Toshiba Corp | Gas-sensitive element |
| GB2142147A (en) * | 1983-06-24 | 1985-01-09 | Standard Telephones Cables Ltd | Gas sensor |
| CH666965A5 (de) * | 1983-08-30 | 1988-08-31 | Cerberus Ag | Verfahren zur herstellung von materialien fuer gassensoren. |
| JPS61110045A (ja) * | 1984-11-02 | 1986-05-28 | Omron Tateisi Electronics Co | 厚膜型センサ |
| US4857275A (en) * | 1986-03-19 | 1989-08-15 | Ngk Spark Plug Co., Ltd. | Thick-film gas-sensitive element |
| US4911892A (en) * | 1987-02-24 | 1990-03-27 | American Intell-Sensors Corporation | Apparatus for simultaneous detection of target gases |
| GB2234074A (en) * | 1989-07-22 | 1991-01-23 | Atomic Energy Authority Uk | Gas sensor |
-
1990
- 1990-11-30 DE DE19904038140 patent/DE4038140A1/de active Granted
-
1991
- 1991-10-09 CA CA 2053049 patent/CA2053049A1/en not_active Abandoned
- 1991-10-16 SE SE9103017A patent/SE9103017L/ not_active Application Discontinuation
- 1991-11-11 NL NL9101879A patent/NL9101879A/nl not_active Application Discontinuation
- 1991-11-18 JP JP30214591A patent/JPH04269649A/ja active Pending
- 1991-11-21 DK DK190091A patent/DK190091A/da not_active Application Discontinuation
- 1991-11-28 GB GB9125334A patent/GB2250823A/en not_active Withdrawn
- 1991-11-29 FR FR9114823A patent/FR2670012A1/fr active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| SE9103017L (sv) | 1992-05-31 |
| DK190091D0 (da) | 1991-11-21 |
| GB9125334D0 (en) | 1992-01-29 |
| DE4038140C2 (enExample) | 1993-05-27 |
| CA2053049A1 (en) | 1992-05-31 |
| GB2250823A (en) | 1992-06-17 |
| NL9101879A (nl) | 1992-06-16 |
| DK190091A (da) | 1992-05-31 |
| SE9103017D0 (sv) | 1991-10-16 |
| DE4038140A1 (de) | 1992-06-04 |
| FR2670012A1 (fr) | 1992-06-05 |
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