JPH0424426B2 - - Google Patents

Info

Publication number
JPH0424426B2
JPH0424426B2 JP59012561A JP1256184A JPH0424426B2 JP H0424426 B2 JPH0424426 B2 JP H0424426B2 JP 59012561 A JP59012561 A JP 59012561A JP 1256184 A JP1256184 A JP 1256184A JP H0424426 B2 JPH0424426 B2 JP H0424426B2
Authority
JP
Japan
Prior art keywords
sputtering
film
storage medium
magnetic storage
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59012561A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60155668A (ja
Inventor
Toshihiro Ando
Tooru Nagaoka
Shuichi Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP59012561A priority Critical patent/JPS60155668A/ja
Publication of JPS60155668A publication Critical patent/JPS60155668A/ja
Publication of JPH0424426B2 publication Critical patent/JPH0424426B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/72—Protective coatings, e.g. anti-static or antifriction
    • G11B5/727—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP59012561A 1984-01-26 1984-01-26 磁気記憶媒体表面に炭化水素保護膜を形成する方法 Granted JPS60155668A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59012561A JPS60155668A (ja) 1984-01-26 1984-01-26 磁気記憶媒体表面に炭化水素保護膜を形成する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59012561A JPS60155668A (ja) 1984-01-26 1984-01-26 磁気記憶媒体表面に炭化水素保護膜を形成する方法

Publications (2)

Publication Number Publication Date
JPS60155668A JPS60155668A (ja) 1985-08-15
JPH0424426B2 true JPH0424426B2 (enrdf_load_stackoverflow) 1992-04-27

Family

ID=11808755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59012561A Granted JPS60155668A (ja) 1984-01-26 1984-01-26 磁気記憶媒体表面に炭化水素保護膜を形成する方法

Country Status (1)

Country Link
JP (1) JPS60155668A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6362656A (ja) * 1986-09-02 1988-03-18 Fuji Photo Film Co Ltd 磁気記録媒体の製造方法
DE3644822A1 (de) * 1986-12-31 1988-07-14 Basf Ag Verfahren zur herstellung von scheibenfoermigen magnetischen aufzeichnungstraegern
US4778582A (en) * 1987-06-02 1988-10-18 International Business Machines Corporation Process for making a thin film metal alloy magnetic recording disk with a hydrogenated carbon overcoat
US5045165A (en) * 1990-02-01 1991-09-03 Komag, Inc. Method for sputtering a hydrogen-doped carbon protective film on a magnetic disk
JP4073567B2 (ja) 1999-01-11 2008-04-09 シャープ株式会社 熱アシスト磁気記録媒体

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4277540A (en) * 1971-05-03 1981-07-07 Aine Harry E Thin film magnetic recording medium
JPS5321901A (en) * 1976-08-11 1978-02-28 Fujitsu Ltd Formation of carbonized protective film for magnetic recording medium
JPS5321902A (en) * 1976-08-11 1978-02-28 Fujitsu Ltd Formation of carbonized protective film for magnetic recording medium
JPS6023406B2 (ja) * 1977-05-18 1985-06-07 日本電気株式会社 磁気デイスク

Also Published As

Publication number Publication date
JPS60155668A (ja) 1985-08-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term