JPH0424366B2 - - Google Patents

Info

Publication number
JPH0424366B2
JPH0424366B2 JP62254924A JP25492487A JPH0424366B2 JP H0424366 B2 JPH0424366 B2 JP H0424366B2 JP 62254924 A JP62254924 A JP 62254924A JP 25492487 A JP25492487 A JP 25492487A JP H0424366 B2 JPH0424366 B2 JP H0424366B2
Authority
JP
Japan
Prior art keywords
group
formula
general formula
trimethyl
polysilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62254924A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0196222A (ja
Inventor
Naotake Sudo
Shigeki Higuchi
Yoshitaka Naoi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JUKI GOSEI YAKUHIN KOGYO KK
Original Assignee
JUKI GOSEI YAKUHIN KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JUKI GOSEI YAKUHIN KOGYO KK filed Critical JUKI GOSEI YAKUHIN KOGYO KK
Priority to JP25492487A priority Critical patent/JPH0196222A/ja
Publication of JPH0196222A publication Critical patent/JPH0196222A/ja
Publication of JPH0424366B2 publication Critical patent/JPH0424366B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Polymers (AREA)
JP25492487A 1987-10-08 1987-10-08 1,2,2−トリメチル−1−(置換フェニル)ポリジシランおよびその製造法 Granted JPH0196222A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25492487A JPH0196222A (ja) 1987-10-08 1987-10-08 1,2,2−トリメチル−1−(置換フェニル)ポリジシランおよびその製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25492487A JPH0196222A (ja) 1987-10-08 1987-10-08 1,2,2−トリメチル−1−(置換フェニル)ポリジシランおよびその製造法

Publications (2)

Publication Number Publication Date
JPH0196222A JPH0196222A (ja) 1989-04-14
JPH0424366B2 true JPH0424366B2 (enrdf_load_stackoverflow) 1992-04-24

Family

ID=17271749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25492487A Granted JPH0196222A (ja) 1987-10-08 1987-10-08 1,2,2−トリメチル−1−(置換フェニル)ポリジシランおよびその製造法

Country Status (1)

Country Link
JP (1) JPH0196222A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000034782A (ko) * 1996-06-07 2000-06-26 료끼 신이찌로 폴리실란 및 정공수송재료
JP2002167438A (ja) * 2000-11-29 2002-06-11 Jsr Corp ケイ素ポリマー、膜形成用組成物および絶縁膜形成用材料
JP4000836B2 (ja) * 2001-11-28 2007-10-31 セイコーエプソン株式会社 膜パターンの形成方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6098431A (ja) * 1983-11-04 1985-06-01 Nippon Telegr & Teleph Corp <Ntt> パタン形成材料及びパタン形成方法
US4588801A (en) * 1984-04-05 1986-05-13 The United States Of America As Represented By The United States Department Of Energy Polysilane positive photoresist materials and methods for their use
JPS63141046A (ja) * 1986-12-03 1988-06-13 Toshiba Corp レジスト

Also Published As

Publication number Publication date
JPH0196222A (ja) 1989-04-14

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Legal Events

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