JPH0422567Y2 - - Google Patents
Info
- Publication number
- JPH0422567Y2 JPH0422567Y2 JP1985203903U JP20390385U JPH0422567Y2 JP H0422567 Y2 JPH0422567 Y2 JP H0422567Y2 JP 1985203903 U JP1985203903 U JP 1985203903U JP 20390385 U JP20390385 U JP 20390385U JP H0422567 Y2 JPH0422567 Y2 JP H0422567Y2
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- frame
- piezoelectric element
- fork type
- type piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001259 photo etching Methods 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 3
- 239000013078 crystal Substances 0.000 description 74
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 10
- 230000000694 effects Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985203903U JPH0422567Y2 (cs) | 1985-12-28 | 1985-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985203903U JPH0422567Y2 (cs) | 1985-12-28 | 1985-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62112210U JPS62112210U (cs) | 1987-07-17 |
| JPH0422567Y2 true JPH0422567Y2 (cs) | 1992-05-25 |
Family
ID=31169669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985203903U Expired JPH0422567Y2 (cs) | 1985-12-28 | 1985-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0422567Y2 (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58179013A (ja) * | 1982-04-14 | 1983-10-20 | アスラブ・ソシエテ・アノニム | 圧電共振素子とその製造方法 |
-
1985
- 1985-12-28 JP JP1985203903U patent/JPH0422567Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58179013A (ja) * | 1982-04-14 | 1983-10-20 | アスラブ・ソシエテ・アノニム | 圧電共振素子とその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62112210U (cs) | 1987-07-17 |
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