JPH0421359B2 - - Google Patents

Info

Publication number
JPH0421359B2
JPH0421359B2 JP62024928A JP2492887A JPH0421359B2 JP H0421359 B2 JPH0421359 B2 JP H0421359B2 JP 62024928 A JP62024928 A JP 62024928A JP 2492887 A JP2492887 A JP 2492887A JP H0421359 B2 JPH0421359 B2 JP H0421359B2
Authority
JP
Japan
Prior art keywords
layer
thickness
thin film
film circuit
barrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62024928A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62199043A (ja
Inventor
Myuraa Jiikufuriito
Hanitsushu Herumuuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHUTANDARUTO EREKUTORIIKU ROORENTSU AG
Original Assignee
SHUTANDARUTO EREKUTORIIKU ROORENTSU AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHUTANDARUTO EREKUTORIIKU ROORENTSU AG filed Critical SHUTANDARUTO EREKUTORIIKU ROORENTSU AG
Publication of JPS62199043A publication Critical patent/JPS62199043A/ja
Publication of JPH0421359B2 publication Critical patent/JPH0421359B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/019—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C1/00—Details
    • H01C1/14—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors
    • H01C1/142—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors the terminals or tapping points being coated on the resistive element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
    • H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10W72/90—
    • H10W72/952—

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Details Of Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP62024928A 1986-02-20 1987-02-06 薄膜回路及びその製造法 Granted JPS62199043A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3605425.9 1986-02-20
DE19863605425 DE3605425A1 (de) 1986-02-20 1986-02-20 Duennschichtschaltung und ein verfahren zu ihrer herstellung

Publications (2)

Publication Number Publication Date
JPS62199043A JPS62199043A (ja) 1987-09-02
JPH0421359B2 true JPH0421359B2 (OSRAM) 1992-04-09

Family

ID=6294533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62024928A Granted JPS62199043A (ja) 1986-02-20 1987-02-06 薄膜回路及びその製造法

Country Status (7)

Country Link
US (1) US4742325A (OSRAM)
EP (1) EP0234487B1 (OSRAM)
JP (1) JPS62199043A (OSRAM)
AT (1) ATE79483T1 (OSRAM)
DE (2) DE3605425A1 (OSRAM)
ES (1) ES2034970T3 (OSRAM)
GR (1) GR3005916T3 (OSRAM)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4136198A1 (de) * 1991-11-02 1993-05-06 Deutsche Aerospace Ag, 8000 Muenchen, De Verfahren zur herstellung eines strukturierten duennfilm-widerstandsschichtsystems sowie schaltungsanordnung mit einem insbesondere nach diesem verfahren hergestellten duennfilm-widerstandsschichtsystem
DE4314665A1 (de) * 1993-05-04 1994-11-10 Hella Kg Hueck & Co Schaltungsanordnung
EP0725969B1 (en) * 1994-08-05 1998-09-30 Koninklijke Philips Electronics N.V. Electrically resistive structure
US6703666B1 (en) 1999-07-14 2004-03-09 Agere Systems Inc. Thin film resistor device and a method of manufacture therefor
US6347175B1 (en) 1999-07-14 2002-02-12 Corning Incorporated Solderable thin film
JP4774789B2 (ja) * 2004-04-14 2011-09-14 三菱化学株式会社 エッチング方法及びエッチング液
KR20070011365A (ko) * 2004-04-14 2007-01-24 미쓰비시 가가꾸 가부시키가이샤 에칭 방법 및 에칭액
US7432202B2 (en) * 2005-12-28 2008-10-07 Intel Corporation Method of substrate manufacture that decreases the package resistance
JP4516538B2 (ja) * 2006-03-01 2010-08-04 住友電工デバイス・イノベーション株式会社 半導体装置の製造方法
KR20130056629A (ko) * 2011-11-22 2013-05-30 삼성전기주식회사 기판 및 이의 제조방법
JP2020010004A (ja) * 2018-07-12 2020-01-16 Koa株式会社 抵抗器及び回路基板

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3649945A (en) * 1971-01-20 1972-03-14 Fairchild Camera Instr Co Thin film resistor contact
US4077854A (en) * 1972-10-02 1978-03-07 The Bendix Corporation Method of manufacture of solderable thin film microcircuit with stabilized resistive films
FR2210881B1 (OSRAM) * 1972-12-14 1976-04-23 Honeywell Bull
FR2290762A1 (fr) * 1974-11-06 1976-06-04 Lignes Telegraph Telephon Procede de realisation de contacts ohmiques pour circuits en couche mince
JPS531858A (en) * 1976-06-29 1978-01-10 Kokusai Electric Co Ltd Method of forming thin film circuit
JPS555842A (en) * 1978-06-28 1980-01-17 Kubota Ltd Preparation of synthetic resin tube
DE2906813C2 (de) * 1979-02-22 1982-06-03 Robert Bosch Gmbh, 7000 Stuttgart Elektronische Dünnschichtschaltung
DE2965814D1 (en) * 1979-03-21 1983-08-11 Bbc Brown Boveri & Cie Thin film resistor having a high temperature coefficient and method of manufacturing the same
GB2186597B (en) * 1986-02-17 1990-04-04 Plessey Co Plc Electrical contact surface coating

Also Published As

Publication number Publication date
JPS62199043A (ja) 1987-09-02
ATE79483T1 (de) 1992-08-15
DE3780980D1 (de) 1992-09-17
GR3005916T3 (OSRAM) 1993-06-07
EP0234487A3 (en) 1990-03-07
ES2034970T3 (es) 1993-04-16
DE3605425A1 (de) 1987-08-27
US4742325A (en) 1988-05-03
EP0234487B1 (de) 1992-08-12
EP0234487A2 (de) 1987-09-02

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