ES2034970T3 - Un circuito de pelicula delgada. - Google Patents
Un circuito de pelicula delgada.Info
- Publication number
- ES2034970T3 ES2034970T3 ES198787102255T ES87102255T ES2034970T3 ES 2034970 T3 ES2034970 T3 ES 2034970T3 ES 198787102255 T ES198787102255 T ES 198787102255T ES 87102255 T ES87102255 T ES 87102255T ES 2034970 T3 ES2034970 T3 ES 2034970T3
- Authority
- ES
- Spain
- Prior art keywords
- film circuit
- thin film
- conductors
- thin
- solderable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/14—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors
- H01C1/142—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors the terminals or tapping points being coated on the resistive element
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
- H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/702—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
- H01L21/707—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thin-film circuits or parts thereof
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04073—Bonding areas specifically adapted for connectors of different types
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05644—Gold [Au] as principal constituent
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01028—Nickel [Ni]
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01046—Palladium [Pd]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01073—Tantalum [Ta]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/049—Nitrides composed of metals from groups of the periodic table
- H01L2924/0495—5th Group
- H01L2924/04953—TaN
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19043—Component type being a resistor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/30105—Capacitance
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Details Of Resistors (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Wire Bonding (AREA)
- Non-Adjustable Resistors (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
ESTA FORMADO POR UNA RESISTENCIA INTEGRADA (2) Y CONDUCTORES (9 QUE PRESENTAN UN RESISTENCIA R< 10 M0HM, SON SOLDABLES Y BONDERIZABLES Y CONSISTEN EN DOS ESTRATOS DE AU (4, 6) SUPERPUESTOS ENTRE LOS CUALES SE DISPONE UN ESTRATO DE PD (5). SE UTILIZA EN TECNICAS DE ALTA FRECUENCIA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19863605425 DE3605425A1 (de) | 1986-02-20 | 1986-02-20 | Duennschichtschaltung und ein verfahren zu ihrer herstellung |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2034970T3 true ES2034970T3 (es) | 1993-04-16 |
Family
ID=6294533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES198787102255T Expired - Lifetime ES2034970T3 (es) | 1986-02-20 | 1987-02-17 | Un circuito de pelicula delgada. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4742325A (es) |
EP (1) | EP0234487B1 (es) |
JP (1) | JPS62199043A (es) |
AT (1) | ATE79483T1 (es) |
DE (2) | DE3605425A1 (es) |
ES (1) | ES2034970T3 (es) |
GR (1) | GR3005916T3 (es) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4136198A1 (de) * | 1991-11-02 | 1993-05-06 | Deutsche Aerospace Ag, 8000 Muenchen, De | Verfahren zur herstellung eines strukturierten duennfilm-widerstandsschichtsystems sowie schaltungsanordnung mit einem insbesondere nach diesem verfahren hergestellten duennfilm-widerstandsschichtsystem |
DE4314665A1 (de) * | 1993-05-04 | 1994-11-10 | Hella Kg Hueck & Co | Schaltungsanordnung |
JPH09503627A (ja) * | 1994-08-05 | 1997-04-08 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | 電気的抵抗構造体 |
US6703666B1 (en) | 1999-07-14 | 2004-03-09 | Agere Systems Inc. | Thin film resistor device and a method of manufacture therefor |
US6347175B1 (en) | 1999-07-14 | 2002-02-12 | Corning Incorporated | Solderable thin film |
CN1946877A (zh) * | 2004-04-14 | 2007-04-11 | 三菱化学株式会社 | 蚀刻方法和蚀刻液 |
JP4774789B2 (ja) * | 2004-04-14 | 2011-09-14 | 三菱化学株式会社 | エッチング方法及びエッチング液 |
US7432202B2 (en) | 2005-12-28 | 2008-10-07 | Intel Corporation | Method of substrate manufacture that decreases the package resistance |
JP4516538B2 (ja) * | 2006-03-01 | 2010-08-04 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
KR20130056629A (ko) * | 2011-11-22 | 2013-05-30 | 삼성전기주식회사 | 기판 및 이의 제조방법 |
JP2020010004A (ja) * | 2018-07-12 | 2020-01-16 | Koa株式会社 | 抵抗器及び回路基板 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3649945A (en) * | 1971-01-20 | 1972-03-14 | Fairchild Camera Instr Co | Thin film resistor contact |
US4077854A (en) * | 1972-10-02 | 1978-03-07 | The Bendix Corporation | Method of manufacture of solderable thin film microcircuit with stabilized resistive films |
FR2210881B1 (es) * | 1972-12-14 | 1976-04-23 | Honeywell Bull | |
FR2290762A1 (fr) * | 1974-11-06 | 1976-06-04 | Lignes Telegraph Telephon | Procede de realisation de contacts ohmiques pour circuits en couche mince |
JPS531858A (en) * | 1976-06-29 | 1978-01-10 | Kokusai Electric Co Ltd | Method of forming thin film circuit |
JPS555842A (en) * | 1978-06-28 | 1980-01-17 | Kubota Ltd | Preparation of synthetic resin tube |
DE2906813C2 (de) * | 1979-02-22 | 1982-06-03 | Robert Bosch Gmbh, 7000 Stuttgart | Elektronische Dünnschichtschaltung |
EP0016263B1 (de) * | 1979-03-21 | 1983-07-06 | BBC Brown Boveri AG | Dünnschichtwiderstand mit grossem Temperaturkoeffizienten und Verfahren zu dessen Herstellung |
GB2186597B (en) * | 1986-02-17 | 1990-04-04 | Plessey Co Plc | Electrical contact surface coating |
-
1986
- 1986-02-20 DE DE19863605425 patent/DE3605425A1/de not_active Withdrawn
-
1987
- 1987-02-06 JP JP62024928A patent/JPS62199043A/ja active Granted
- 1987-02-17 ES ES198787102255T patent/ES2034970T3/es not_active Expired - Lifetime
- 1987-02-17 AT AT87102255T patent/ATE79483T1/de not_active IP Right Cessation
- 1987-02-17 DE DE8787102255T patent/DE3780980D1/de not_active Expired - Lifetime
- 1987-02-17 EP EP19870102255 patent/EP0234487B1/de not_active Expired - Lifetime
- 1987-02-20 US US07/017,215 patent/US4742325A/en not_active Expired - Fee Related
-
1992
- 1992-10-08 GR GR920402236T patent/GR3005916T3/el unknown
Also Published As
Publication number | Publication date |
---|---|
EP0234487A2 (de) | 1987-09-02 |
US4742325A (en) | 1988-05-03 |
GR3005916T3 (es) | 1993-06-07 |
EP0234487A3 (en) | 1990-03-07 |
JPH0421359B2 (es) | 1992-04-09 |
ATE79483T1 (de) | 1992-08-15 |
DE3605425A1 (de) | 1987-08-27 |
DE3780980D1 (de) | 1992-09-17 |
EP0234487B1 (de) | 1992-08-12 |
JPS62199043A (ja) | 1987-09-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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