JPH0420231U - - Google Patents
Info
- Publication number
- JPH0420231U JPH0420231U JP1990062517U JP6251790U JPH0420231U JP H0420231 U JPH0420231 U JP H0420231U JP 1990062517 U JP1990062517 U JP 1990062517U JP 6251790 U JP6251790 U JP 6251790U JP H0420231 U JPH0420231 U JP H0420231U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- semiconductor substrate
- aluminum film
- film formed
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
第1図はこの考案の一実施例を示す半導体集積
回路はボンテイングパツド部の断面図、第2図は
この考案の他の実施例を示す半導体集積回路装置
のボンデイングパツド部の平面図、第3図は従来
のボンテイングパツド部の平面図、第4図は従来
の半導体集積回路装置のボンテイングパツド部の
断面図、第5図は第4図の半導体集積回路装置の
問題点を示すボンテイングパツト部の断面図であ
る。 1……半導体基板、2……熱酸化膜、3……ボ
ンテイングパツド下層部、4……絶縁膜、5……
ボンテイングパツド上層部、6……表面保護膜、
7……アルミ引き出し膜、8……金ボール。なお
、図中、同一符号は同一、または相当部分を示す
。
回路はボンテイングパツド部の断面図、第2図は
この考案の他の実施例を示す半導体集積回路装置
のボンデイングパツド部の平面図、第3図は従来
のボンテイングパツド部の平面図、第4図は従来
の半導体集積回路装置のボンテイングパツド部の
断面図、第5図は第4図の半導体集積回路装置の
問題点を示すボンテイングパツト部の断面図であ
る。 1……半導体基板、2……熱酸化膜、3……ボ
ンテイングパツド下層部、4……絶縁膜、5……
ボンテイングパツド上層部、6……表面保護膜、
7……アルミ引き出し膜、8……金ボール。なお
、図中、同一符号は同一、または相当部分を示す
。
Claims (1)
- 半導体基板と、この半導体基板上に形成された
酸化膜または絶縁膜上に形成された第1層目のア
ルミ膜と、さらにこの上に形成され第2層目のア
ルミ膜により構成される外部電極を備え、上記半
導体基板上に形成された能動域との接続を上記第
1層目のアルミ膜を上記電極よりの引き出し線と
したことを特徴とする半導体集積回路装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990062517U JPH0420231U (ja) | 1990-06-12 | 1990-06-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990062517U JPH0420231U (ja) | 1990-06-12 | 1990-06-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0420231U true JPH0420231U (ja) | 1992-02-20 |
Family
ID=31591740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990062517U Pending JPH0420231U (ja) | 1990-06-12 | 1990-06-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0420231U (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62245655A (ja) * | 1986-04-18 | 1987-10-26 | Hitachi Ltd | 半導体装置 |
JPH0287525A (ja) * | 1988-09-22 | 1990-03-28 | Nec Corp | 半導体装置 |
-
1990
- 1990-06-12 JP JP1990062517U patent/JPH0420231U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62245655A (ja) * | 1986-04-18 | 1987-10-26 | Hitachi Ltd | 半導体装置 |
JPH0287525A (ja) * | 1988-09-22 | 1990-03-28 | Nec Corp | 半導体装置 |