JPH0416177Y2 - - Google Patents

Info

Publication number
JPH0416177Y2
JPH0416177Y2 JP1982148014U JP14801482U JPH0416177Y2 JP H0416177 Y2 JPH0416177 Y2 JP H0416177Y2 JP 1982148014 U JP1982148014 U JP 1982148014U JP 14801482 U JP14801482 U JP 14801482U JP H0416177 Y2 JPH0416177 Y2 JP H0416177Y2
Authority
JP
Japan
Prior art keywords
light
diffraction grating
order
reflected
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982148014U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5953209U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14801482U priority Critical patent/JPS5953209U/ja
Publication of JPS5953209U publication Critical patent/JPS5953209U/ja
Application granted granted Critical
Publication of JPH0416177Y2 publication Critical patent/JPH0416177Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP14801482U 1982-10-01 1982-10-01 光学式測長スケ−ル Granted JPS5953209U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14801482U JPS5953209U (ja) 1982-10-01 1982-10-01 光学式測長スケ−ル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14801482U JPS5953209U (ja) 1982-10-01 1982-10-01 光学式測長スケ−ル

Publications (2)

Publication Number Publication Date
JPS5953209U JPS5953209U (ja) 1984-04-07
JPH0416177Y2 true JPH0416177Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-10

Family

ID=30328988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14801482U Granted JPS5953209U (ja) 1982-10-01 1982-10-01 光学式測長スケ−ル

Country Status (1)

Country Link
JP (1) JPS5953209U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07117425B2 (ja) * 1985-08-08 1995-12-18 工業技術院長 相対変位測定方法
JPH07119623B2 (ja) * 1986-01-14 1995-12-20 キヤノン株式会社 変位測定装置
JPH07119626B2 (ja) * 1986-02-27 1995-12-20 キヤノン株式会社 ロータリーエンコーダー
JPH073344B2 (ja) * 1987-06-15 1995-01-18 キヤノン株式会社 エンコ−ダ−
JP2517027B2 (ja) * 1987-12-18 1996-07-24 日本電信電話株式会社 移動量測定方法及び移動量測定装置
DE102015203188A1 (de) * 2015-02-23 2016-08-25 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-11-05 1982-05-20

Also Published As

Publication number Publication date
JPS5953209U (ja) 1984-04-07

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