JPH0415682Y2 - - Google Patents
Info
- Publication number
- JPH0415682Y2 JPH0415682Y2 JP1986070266U JP7026686U JPH0415682Y2 JP H0415682 Y2 JPH0415682 Y2 JP H0415682Y2 JP 1986070266 U JP1986070266 U JP 1986070266U JP 7026686 U JP7026686 U JP 7026686U JP H0415682 Y2 JPH0415682 Y2 JP H0415682Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- wafer
- wafers
- cartridge
- basket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Registering Or Overturning Sheets (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986070266U JPH0415682Y2 (en, 2012) | 1986-05-09 | 1986-05-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986070266U JPH0415682Y2 (en, 2012) | 1986-05-09 | 1986-05-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62181546U JPS62181546U (en, 2012) | 1987-11-18 |
JPH0415682Y2 true JPH0415682Y2 (en, 2012) | 1992-04-08 |
Family
ID=30911750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986070266U Expired JPH0415682Y2 (en, 2012) | 1986-05-09 | 1986-05-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0415682Y2 (en, 2012) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6236229A (ja) * | 1985-08-08 | 1987-02-17 | Canon Inc | ウエハ処理装置 |
-
1986
- 1986-05-09 JP JP1986070266U patent/JPH0415682Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS62181546U (en, 2012) | 1987-11-18 |
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