JPH0540002Y2 - - Google Patents

Info

Publication number
JPH0540002Y2
JPH0540002Y2 JP1986111866U JP11186686U JPH0540002Y2 JP H0540002 Y2 JPH0540002 Y2 JP H0540002Y2 JP 1986111866 U JP1986111866 U JP 1986111866U JP 11186686 U JP11186686 U JP 11186686U JP H0540002 Y2 JPH0540002 Y2 JP H0540002Y2
Authority
JP
Japan
Prior art keywords
plate
wafer
shaped
substantially horizontally
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986111866U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6318427U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986111866U priority Critical patent/JPH0540002Y2/ja
Publication of JPS6318427U publication Critical patent/JPS6318427U/ja
Application granted granted Critical
Publication of JPH0540002Y2 publication Critical patent/JPH0540002Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1986111866U 1986-07-21 1986-07-21 Expired - Lifetime JPH0540002Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986111866U JPH0540002Y2 (en, 2012) 1986-07-21 1986-07-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986111866U JPH0540002Y2 (en, 2012) 1986-07-21 1986-07-21

Publications (2)

Publication Number Publication Date
JPS6318427U JPS6318427U (en, 2012) 1988-02-06
JPH0540002Y2 true JPH0540002Y2 (en, 2012) 1993-10-12

Family

ID=30992191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986111866U Expired - Lifetime JPH0540002Y2 (en, 2012) 1986-07-21 1986-07-21

Country Status (1)

Country Link
JP (1) JPH0540002Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4745209B2 (ja) * 2006-12-13 2011-08-10 信越ポリマー株式会社 基板用キャリア

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59101847A (ja) * 1982-12-01 1984-06-12 Seiko Instr & Electronics Ltd 半導体ウエハの受取，受渡し装置
JPS59107140U (ja) * 1982-12-29 1984-07-19 日本電気ホームエレクトロニクス株式会社 半導体ウエ−ハ移送装置

Also Published As

Publication number Publication date
JPS6318427U (en, 2012) 1988-02-06

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