JPH0573641B2 - - Google Patents
Info
- Publication number
- JPH0573641B2 JPH0573641B2 JP24828685A JP24828685A JPH0573641B2 JP H0573641 B2 JPH0573641 B2 JP H0573641B2 JP 24828685 A JP24828685 A JP 24828685A JP 24828685 A JP24828685 A JP 24828685A JP H0573641 B2 JPH0573641 B2 JP H0573641B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- wafer
- cartridge
- wafers
- basket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 100
- 239000004065 semiconductor Substances 0.000 description 16
- 238000012546 transfer Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000003319 supportive effect Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24828685A JPS62111837A (ja) | 1985-11-06 | 1985-11-06 | 板状体取出し装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24828685A JPS62111837A (ja) | 1985-11-06 | 1985-11-06 | 板状体取出し装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62111837A JPS62111837A (ja) | 1987-05-22 |
JPH0573641B2 true JPH0573641B2 (en, 2012) | 1993-10-14 |
Family
ID=17175833
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24828685A Granted JPS62111837A (ja) | 1985-11-06 | 1985-11-06 | 板状体取出し装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62111837A (en, 2012) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0512576B1 (en) * | 1991-05-10 | 1995-08-09 | Mazda Motor Corporation | Vehicle assembling method and vehicle body structure |
-
1985
- 1985-11-06 JP JP24828685A patent/JPS62111837A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62111837A (ja) | 1987-05-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0172653B1 (en) | Slotted cantilever diffusion tube system and method and apparatus for loading | |
KR100602341B1 (ko) | 기판 처리 방법 및 장치 | |
EP0502412B1 (en) | Processing system | |
JP2925329B2 (ja) | ウェーファ移送装置及びウェーファ移送方法 | |
KR100625913B1 (ko) | 기판 이송 및 처리 방법 및 장치 | |
WO1997003003A1 (en) | Wafer transfer system having rotational capability | |
KR20080071504A (ko) | 종형 열처리 장치 및 그 종형 열처리 장치를 이용한 열처리방법 | |
US5741109A (en) | Wafer transfer system having vertical lifting capability | |
KR100285081B1 (ko) | 웨이퍼보트 회전장치 | |
US5647718A (en) | Straight line wafer transfer system | |
JPH0586066B2 (en, 2012) | ||
JPH10284577A (ja) | 被処理基板の移載方法 | |
JPH0573641B2 (en, 2012) | ||
KR19980042623A (ko) | 카세트반송기구 | |
JPH1179388A (ja) | ガラス類枚葉処理装置 | |
JP2002299421A (ja) | ノッチ整列方法及びノッチ整列機構並びに半導体製造装置 | |
JP2001160584A (ja) | 半導体処理装置の基板支持機構及び基板交換方法、並びに半導体処理装置及び基板搬送装置 | |
JPH01251633A (ja) | ウエハ移替え装置 | |
JPH10321704A (ja) | 基板移載機 | |
JPH0343173B2 (en, 2012) | ||
JPS62136439A (ja) | 板状体取出し装置 | |
JPH0211489B2 (en, 2012) | ||
JP2004221610A (ja) | 半導体処理装置 | |
JPS6141237Y2 (en, 2012) | ||
JPH0540002Y2 (en, 2012) |