JPH0415442B2 - - Google Patents
Info
- Publication number
- JPH0415442B2 JPH0415442B2 JP62018656A JP1865687A JPH0415442B2 JP H0415442 B2 JPH0415442 B2 JP H0415442B2 JP 62018656 A JP62018656 A JP 62018656A JP 1865687 A JP1865687 A JP 1865687A JP H0415442 B2 JPH0415442 B2 JP H0415442B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- refractive index
- cef
- antireflection
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 13
- XJUNRGGMKUAPAP-UHFFFAOYSA-N dioxido(dioxo)molybdenum;lead(2+) Chemical compound [Pb+2].[O-][Mo]([O-])(=O)=O XJUNRGGMKUAPAP-UHFFFAOYSA-N 0.000 claims description 13
- QCCDYNYSHILRDG-UHFFFAOYSA-K cerium(3+);trifluoride Chemical class [F-].[F-].[F-].[Ce+3] QCCDYNYSHILRDG-UHFFFAOYSA-K 0.000 claims description 10
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000010408 film Substances 0.000 description 96
- 239000010410 layer Substances 0.000 description 20
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 15
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- SITVSCPRJNYAGV-UHFFFAOYSA-L tellurite Chemical compound [O-][Te]([O-])=O SITVSCPRJNYAGV-UHFFFAOYSA-L 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62018656A JPS63187201A (ja) | 1987-01-30 | 1987-01-30 | 反射防止膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62018656A JPS63187201A (ja) | 1987-01-30 | 1987-01-30 | 反射防止膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63187201A JPS63187201A (ja) | 1988-08-02 |
| JPH0415442B2 true JPH0415442B2 (enrdf_load_stackoverflow) | 1992-03-18 |
Family
ID=11977660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62018656A Granted JPS63187201A (ja) | 1987-01-30 | 1987-01-30 | 反射防止膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63187201A (enrdf_load_stackoverflow) |
-
1987
- 1987-01-30 JP JP62018656A patent/JPS63187201A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63187201A (ja) | 1988-08-02 |
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