JPH0412000B2 - - Google Patents
Info
- Publication number
- JPH0412000B2 JPH0412000B2 JP9599585A JP9599585A JPH0412000B2 JP H0412000 B2 JPH0412000 B2 JP H0412000B2 JP 9599585 A JP9599585 A JP 9599585A JP 9599585 A JP9599585 A JP 9599585A JP H0412000 B2 JPH0412000 B2 JP H0412000B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- water
- heating resistor
- cooled
- conductive member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 36
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910002804 graphite Inorganic materials 0.000 claims description 7
- 239000010439 graphite Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000013078 crystal Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9599585A JPS61256585A (ja) | 1985-05-08 | 1985-05-08 | 加熱用抵抗体のための電極構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9599585A JPS61256585A (ja) | 1985-05-08 | 1985-05-08 | 加熱用抵抗体のための電極構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61256585A JPS61256585A (ja) | 1986-11-14 |
| JPH0412000B2 true JPH0412000B2 (enrdf_load_html_response) | 1992-03-03 |
Family
ID=14152694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9599585A Granted JPS61256585A (ja) | 1985-05-08 | 1985-05-08 | 加熱用抵抗体のための電極構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61256585A (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0641355Y2 (ja) * | 1988-02-16 | 1994-10-26 | 富士電波工業株式会社 | 電気炉用水冷電極 |
-
1985
- 1985-05-08 JP JP9599585A patent/JPS61256585A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61256585A (ja) | 1986-11-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6376808B2 (en) | Heating apparatus | |
| JPH0412000B2 (enrdf_load_html_response) | ||
| US5126533A (en) | Substrate heater utilizing protective heat sinking means | |
| JP2719938B2 (ja) | 冶金用電気炉の炉壁電極 | |
| US5843228A (en) | Apparatus for preventing heater electrode meltdown in single crystal pulling apparatus | |
| JP6014237B1 (ja) | サファイア単結晶部材製造装置 | |
| JPH06124766A (ja) | セラミックスヒータと金属電極との取り付け構造 | |
| JP3491465B2 (ja) | 単結晶引上装置におけるヒーター電極構造 | |
| JP4890946B2 (ja) | プラズマ処理装置 | |
| JP3709492B2 (ja) | 単結晶引上げ装置のヒータ取付構造 | |
| JPH046762A (ja) | 耐熱接続電極 | |
| JP2797111B2 (ja) | スパッタ装置 | |
| JP2558346Y2 (ja) | 含浸電極型金属イオン源 | |
| JP3134560B2 (ja) | 加熱炉 | |
| JP4149565B2 (ja) | 高純度薄膜形成用同軸型真空アーク蒸着源 | |
| JPH05336645A (ja) | 高電圧ケーブルのコネクタ装置 | |
| JPH0629087A (ja) | 電極支持装置 | |
| EP0152307A2 (en) | Leadthrough arrangement | |
| JPH03194836A (ja) | 電子ビーム発生装置 | |
| JP3109139B2 (ja) | 直流ア−ク炉の炉底構造 | |
| JPS6326762Y2 (enrdf_load_html_response) | ||
| JPH0438717B2 (enrdf_load_html_response) | ||
| JP2650190B2 (ja) | 大出力白熱電球の製造方法 | |
| JP2555322Y2 (ja) | 核融合炉第１壁保護タイルの支持構造 | |
| JPS5926930A (ja) | モリブデン電極構体とその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |