JPH0411491B2 - - Google Patents

Info

Publication number
JPH0411491B2
JPH0411491B2 JP61071211A JP7121186A JPH0411491B2 JP H0411491 B2 JPH0411491 B2 JP H0411491B2 JP 61071211 A JP61071211 A JP 61071211A JP 7121186 A JP7121186 A JP 7121186A JP H0411491 B2 JPH0411491 B2 JP H0411491B2
Authority
JP
Japan
Prior art keywords
thin film
zirconia
butoxyzirconium
acetylacetonate
spray solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61071211A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62227477A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7121186A priority Critical patent/JPS62227477A/ja
Publication of JPS62227477A publication Critical patent/JPS62227477A/ja
Publication of JPH0411491B2 publication Critical patent/JPH0411491B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP7121186A 1986-03-31 1986-03-31 ジルコニア薄膜の製造方法 Granted JPS62227477A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7121186A JPS62227477A (ja) 1986-03-31 1986-03-31 ジルコニア薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7121186A JPS62227477A (ja) 1986-03-31 1986-03-31 ジルコニア薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS62227477A JPS62227477A (ja) 1987-10-06
JPH0411491B2 true JPH0411491B2 (cs) 1992-02-28

Family

ID=13454118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7121186A Granted JPS62227477A (ja) 1986-03-31 1986-03-31 ジルコニア薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS62227477A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2648341B2 (ja) * 1988-07-29 1997-08-27 田中貴金属工業株式会社 薄膜酸素センサの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841724A (ja) * 1981-09-02 1983-03-11 Nippon Soda Co Ltd 金属酸化被膜形成組成物
JPS59209212A (ja) * 1983-05-12 1984-11-27 鐘淵化学工業株式会社 透明性強誘電体薄膜およびその製造法

Also Published As

Publication number Publication date
JPS62227477A (ja) 1987-10-06

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Legal Events

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