JPH0410750B2 - - Google Patents

Info

Publication number
JPH0410750B2
JPH0410750B2 JP61141655A JP14165586A JPH0410750B2 JP H0410750 B2 JPH0410750 B2 JP H0410750B2 JP 61141655 A JP61141655 A JP 61141655A JP 14165586 A JP14165586 A JP 14165586A JP H0410750 B2 JPH0410750 B2 JP H0410750B2
Authority
JP
Japan
Prior art keywords
piezoelectric
plate
piezoelectric ceramic
prismatic
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61141655A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62298189A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61141655A priority Critical patent/JPS62298189A/ja
Publication of JPS62298189A publication Critical patent/JPS62298189A/ja
Publication of JPH0410750B2 publication Critical patent/JPH0410750B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP61141655A 1986-06-18 1986-06-18 圧電アクチユエ−タ Granted JPS62298189A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61141655A JPS62298189A (ja) 1986-06-18 1986-06-18 圧電アクチユエ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61141655A JPS62298189A (ja) 1986-06-18 1986-06-18 圧電アクチユエ−タ

Publications (2)

Publication Number Publication Date
JPS62298189A JPS62298189A (ja) 1987-12-25
JPH0410750B2 true JPH0410750B2 (en:Method) 1992-02-26

Family

ID=15297094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61141655A Granted JPS62298189A (ja) 1986-06-18 1986-06-18 圧電アクチユエ−タ

Country Status (1)

Country Link
JP (1) JPS62298189A (en:Method)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0262637B1 (en) * 1986-09-29 1995-03-22 Mitsubishi Chemical Corporation Piezoelectric actuator
JP2533861B2 (ja) * 1986-09-29 1996-09-11 三菱化学株式会社 圧電アクチユエ−タ
JP2706083B2 (ja) * 1988-03-28 1998-01-28 三菱化学株式会社 圧電アクチュエータ
JP2886588B2 (ja) * 1989-07-11 1999-04-26 日本碍子株式会社 圧電／電歪アクチュエータ
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
DE69223096T2 (de) * 1991-07-18 1998-05-28 Ngk Insulators Ltd Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
JP5532617B2 (ja) * 2009-01-30 2014-06-25 株式会社村田製作所 圧電アクチュエータ
JP5245960B2 (ja) * 2009-03-19 2013-07-24 富士通株式会社 ヘッドスライダ、ヘッドスライダの製造方法、及び記憶装置

Also Published As

Publication number Publication date
JPS62298189A (ja) 1987-12-25

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