JPH038483A - 洗浄装置 - Google Patents

洗浄装置

Info

Publication number
JPH038483A
JPH038483A JP14441089A JP14441089A JPH038483A JP H038483 A JPH038483 A JP H038483A JP 14441089 A JP14441089 A JP 14441089A JP 14441089 A JP14441089 A JP 14441089A JP H038483 A JPH038483 A JP H038483A
Authority
JP
Japan
Prior art keywords
upper chamber
cleaning
cleaned
cleaning device
shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14441089A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0551357B2 (enExample
Inventor
Masahide Uchino
正英 内野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JAPAN FUIRUDO KK
Japan Field Co Ltd
Original Assignee
JAPAN FUIRUDO KK
Japan Field Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JAPAN FUIRUDO KK, Japan Field Co Ltd filed Critical JAPAN FUIRUDO KK
Priority to JP14441089A priority Critical patent/JPH038483A/ja
Publication of JPH038483A publication Critical patent/JPH038483A/ja
Publication of JPH0551357B2 publication Critical patent/JPH0551357B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP14441089A 1989-06-07 1989-06-07 洗浄装置 Granted JPH038483A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14441089A JPH038483A (ja) 1989-06-07 1989-06-07 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14441089A JPH038483A (ja) 1989-06-07 1989-06-07 洗浄装置

Publications (2)

Publication Number Publication Date
JPH038483A true JPH038483A (ja) 1991-01-16
JPH0551357B2 JPH0551357B2 (enExample) 1993-08-02

Family

ID=15361524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14441089A Granted JPH038483A (ja) 1989-06-07 1989-06-07 洗浄装置

Country Status (1)

Country Link
JP (1) JPH038483A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0754179A (ja) * 1993-08-06 1995-02-28 Kimura Chem Plants Co Ltd 洗浄乾燥装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0754179A (ja) * 1993-08-06 1995-02-28 Kimura Chem Plants Co Ltd 洗浄乾燥装置

Also Published As

Publication number Publication date
JPH0551357B2 (enExample) 1993-08-02

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