JPH0377442B2 - - Google Patents
Info
- Publication number
- JPH0377442B2 JPH0377442B2 JP55021393A JP2139380A JPH0377442B2 JP H0377442 B2 JPH0377442 B2 JP H0377442B2 JP 55021393 A JP55021393 A JP 55021393A JP 2139380 A JP2139380 A JP 2139380A JP H0377442 B2 JPH0377442 B2 JP H0377442B2
- Authority
- JP
- Japan
- Prior art keywords
- scale
- metal
- light
- manufacturing
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052751 metal Inorganic materials 0.000 claims description 54
- 239000002184 metal Substances 0.000 claims description 54
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 229920002120 photoresistant polymer Polymers 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 238000010521 absorption reaction Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 description 19
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000031700 light absorption Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 239000003518 caustics Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 3
- 238000007788 roughening Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000010953 base metal Substances 0.000 description 2
- XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000668842 Lepidosaphes gloverii Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B1/00—Measuring instruments characterised by the selection of material therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B3/00—Measuring instruments characterised by the use of mechanical techniques
- G01B3/02—Rulers with scales or marks for direct reading
- G01B3/04—Rulers with scales or marks for direct reading rigid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139380A JPS56118606A (en) | 1980-02-22 | 1980-02-22 | Metal scale and manufacture thereof |
| DE19813105934 DE3105934A1 (de) | 1980-02-22 | 1981-02-18 | Metallskala und verfahren zu ihrer herstellung |
| GB8105226A GB2072850B (en) | 1980-02-22 | 1981-02-19 | Metal scale for an electronic measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139380A JPS56118606A (en) | 1980-02-22 | 1980-02-22 | Metal scale and manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56118606A JPS56118606A (en) | 1981-09-17 |
| JPH0377442B2 true JPH0377442B2 (de) | 1991-12-10 |
Family
ID=12053811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2139380A Granted JPS56118606A (en) | 1980-02-22 | 1980-02-22 | Metal scale and manufacture thereof |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS56118606A (de) |
| DE (1) | DE3105934A1 (de) |
| GB (1) | GB2072850B (de) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60118912U (ja) * | 1984-01-18 | 1985-08-12 | アルプス電気株式会社 | 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル |
| JPS61102915U (de) * | 1984-12-12 | 1986-07-01 | ||
| JPS61197510U (de) * | 1985-05-31 | 1986-12-10 | ||
| GB2188426A (en) * | 1986-03-26 | 1987-09-30 | Digital Building Systems Limit | Quantity surveying instrument |
| JPH04208810A (ja) * | 1990-12-03 | 1992-07-30 | Omron Corp | 変位信号出力装置 |
| US5963330A (en) * | 1996-11-13 | 1999-10-05 | Dr. Johannes Heidenhain Gmbh | Optical position measuring device |
| GB2339910A (en) * | 1998-07-17 | 2000-02-09 | Ab Automotive Electronics Ltd | Position determining system for a vehicle seat |
| DE19937023A1 (de) * | 1999-08-05 | 2001-02-08 | Heidenhain Gmbh Dr Johannes | Reflexions-Maßverkörperung und Verfahren zur Herstellung einer Reflexions-Maßverkörperung |
| JP2006337321A (ja) * | 2005-06-06 | 2006-12-14 | Mitsutoyo Corp | 光学スケール、及び、その製造方法 |
| US20150160041A1 (en) * | 2011-12-28 | 2015-06-11 | Nikon Corporation | Encoder, manufacturing method of encore scale manufacturing method of encoder, and driving apparatus |
| JP6425875B2 (ja) * | 2013-06-14 | 2018-11-21 | 株式会社ミツトヨ | 光電式測定器用スケール、エンコーダ及びスケールの形成方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR638014A (fr) * | 1926-07-10 | 1928-05-14 | Comp Generale Electricite | Procédé pour l'obtention de couches de nickel à partir des tôles composées de couches alternantes de nickel et de cuivre |
| DE902713C (de) * | 1950-02-28 | 1955-11-17 | Wenczler & Heidenhain | Verfahren zum Aufbringen von Kopien auf beliebiges Material |
| DE1217637B (de) * | 1961-01-04 | 1966-05-26 | Philips Nv | Vorrichtung zum Messen von Verschiebungen |
| DE1278124B (de) * | 1965-09-02 | 1968-09-19 | Leitz Ernst Gmbh | Verfahren zur Herstellung von Teilungen, Messmarken, Gittern u. dgl. |
| CH460365A (de) * | 1966-12-08 | 1968-07-31 | Wild Heerbrugg Ag | Auf einem optischen Träger aufgebrachte lichtundurchlässige und reflexionsfreie Beschichtung |
| DE1798372A1 (de) * | 1967-03-28 | 1972-08-10 | Rudolph Dietbert Dipl Phys | Verfahren zur Herstellung von Reflexions- und Transmissionsgittern |
| AT284483B (de) * | 1967-08-10 | 1970-09-10 | Wenczler & Heidenhain | Geätzte Meßteilung und Verfahren zu deren Herstellung |
| US3878391A (en) * | 1973-12-17 | 1975-04-15 | Westinghouse Electric Corp | Radiometric pulse initiator having a reflective patterned drum |
| DE3316144A1 (de) * | 1982-05-04 | 1983-11-10 | Canon K.K., Tokyo | Verfahren und vorrichtung zum messen des ausmasses einer bewegung |
-
1980
- 1980-02-22 JP JP2139380A patent/JPS56118606A/ja active Granted
-
1981
- 1981-02-18 DE DE19813105934 patent/DE3105934A1/de active Granted
- 1981-02-19 GB GB8105226A patent/GB2072850B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB2072850A (en) | 1981-10-07 |
| DE3105934A1 (de) | 1982-01-07 |
| DE3105934C2 (de) | 1991-07-18 |
| JPS56118606A (en) | 1981-09-17 |
| GB2072850B (en) | 1984-02-29 |
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