JPH0372442B2 - - Google Patents

Info

Publication number
JPH0372442B2
JPH0372442B2 JP20193482A JP20193482A JPH0372442B2 JP H0372442 B2 JPH0372442 B2 JP H0372442B2 JP 20193482 A JP20193482 A JP 20193482A JP 20193482 A JP20193482 A JP 20193482A JP H0372442 B2 JPH0372442 B2 JP H0372442B2
Authority
JP
Japan
Prior art keywords
grindstone
cutting
grinding
displacement means
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20193482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5993312A (ja
Inventor
Masayasu Fujisawa
Tsuneo Oku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP20193482A priority Critical patent/JPS5993312A/ja
Publication of JPS5993312A publication Critical patent/JPS5993312A/ja
Publication of JPH0372442B2 publication Critical patent/JPH0372442B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP20193482A 1982-11-19 1982-11-19 高精度研削切断装置 Granted JPS5993312A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20193482A JPS5993312A (ja) 1982-11-19 1982-11-19 高精度研削切断装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20193482A JPS5993312A (ja) 1982-11-19 1982-11-19 高精度研削切断装置

Publications (2)

Publication Number Publication Date
JPS5993312A JPS5993312A (ja) 1984-05-29
JPH0372442B2 true JPH0372442B2 (enrdf_load_stackoverflow) 1991-11-18

Family

ID=16449205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20193482A Granted JPS5993312A (ja) 1982-11-19 1982-11-19 高精度研削切断装置

Country Status (1)

Country Link
JP (1) JPS5993312A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010073821A (ja) * 2008-09-17 2010-04-02 Disco Abrasive Syst Ltd ウェーハ分割方法
WO2012126840A1 (de) * 2011-03-24 2012-09-27 Erwin Junker Maschinenfabrik Gmbh Schleifmaschinen-einrichtung mit schwenklagerung einer schleifspindeleinheit und verfahren zum verschwenken einer schleifspindeleinheit an einer schleifmaschine
JP6144095B2 (ja) * 2013-04-18 2017-06-07 株式会社ディスコ 切削装置

Also Published As

Publication number Publication date
JPS5993312A (ja) 1984-05-29

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