JPH0372154B2 - - Google Patents

Info

Publication number
JPH0372154B2
JPH0372154B2 JP1689086A JP1689086A JPH0372154B2 JP H0372154 B2 JPH0372154 B2 JP H0372154B2 JP 1689086 A JP1689086 A JP 1689086A JP 1689086 A JP1689086 A JP 1689086A JP H0372154 B2 JPH0372154 B2 JP H0372154B2
Authority
JP
Japan
Prior art keywords
sample
ion
ion source
vapor
deposited metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1689086A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62177177A (ja
Inventor
Katsuhiko Yui
Kazuhiko Fukutani
Kenji Sugyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP1689086A priority Critical patent/JPS62177177A/ja
Publication of JPS62177177A publication Critical patent/JPS62177177A/ja
Publication of JPH0372154B2 publication Critical patent/JPH0372154B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1689086A 1986-01-30 1986-01-30 イオンミキシング装置 Granted JPS62177177A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1689086A JPS62177177A (ja) 1986-01-30 1986-01-30 イオンミキシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1689086A JPS62177177A (ja) 1986-01-30 1986-01-30 イオンミキシング装置

Publications (2)

Publication Number Publication Date
JPS62177177A JPS62177177A (ja) 1987-08-04
JPH0372154B2 true JPH0372154B2 (enrdf_load_stackoverflow) 1991-11-15

Family

ID=11928757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1689086A Granted JPS62177177A (ja) 1986-01-30 1986-01-30 イオンミキシング装置

Country Status (1)

Country Link
JP (1) JPS62177177A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102427918B (zh) * 2009-05-15 2015-01-28 吉列公司 剃刀刀片涂层

Also Published As

Publication number Publication date
JPS62177177A (ja) 1987-08-04

Similar Documents

Publication Publication Date Title
JPH0372154B2 (enrdf_load_stackoverflow)
JPS6056066A (ja) 薄膜形成装置
JP3544907B2 (ja) マグネトロンスパッタ装置
JPH0726197B2 (ja) 薄膜形成方法及びその装置
JP2526182B2 (ja) 化合物薄膜の形成方法及び装置
JPH0663087B2 (ja) 窒化チタン膜の形成方法
JPS62267464A (ja) イオン蒸着薄膜形成装置
JPH04350156A (ja) 薄膜形成装置
JPH02254159A (ja) イオンプレーティングによる薄膜形成方法
JP2000038663A (ja) マグネトロンスパッタ装置
JPH08283940A (ja) 薄膜形成装置
EP0634779A1 (en) Collimation chamber with rotatable pedestal
JPS63100179A (ja) 膜形成装置
JP2771695B2 (ja) 高硬度被膜の形成方法
JP3071164B2 (ja) 刃物の製造方法
JPH0784650B2 (ja) 真空蒸着方法及び真空蒸着装置
JPH02160609A (ja) 酸化物超電導体形成用ターゲット
JPS61227165A (ja) 蒸着装置
JPH06108228A (ja) 薄膜形成方法
JPH03267366A (ja) 薄膜形成装置ならびにその運転方法
JP4408505B2 (ja) ダイヤモンドライクカーボン膜の形成方法と装置
JPH0361361A (ja) 薄膜形成装置
JP2004156144A (ja) マグネトロンスパッタ装置
JPH05271909A (ja) 酸化亜鉛膜の製造方法
JPH0733571B2 (ja) 膜形成装置