JPH0369187B2 - - Google Patents

Info

Publication number
JPH0369187B2
JPH0369187B2 JP59108117A JP10811784A JPH0369187B2 JP H0369187 B2 JPH0369187 B2 JP H0369187B2 JP 59108117 A JP59108117 A JP 59108117A JP 10811784 A JP10811784 A JP 10811784A JP H0369187 B2 JPH0369187 B2 JP H0369187B2
Authority
JP
Japan
Prior art keywords
layer
etching
diaphragm
substrate
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59108117A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60251673A (ja
Inventor
Shinji Tanigawara
Hajime Kishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP59108117A priority Critical patent/JPS60251673A/ja
Publication of JPS60251673A publication Critical patent/JPS60251673A/ja
Publication of JPH0369187B2 publication Critical patent/JPH0369187B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP59108117A 1984-05-28 1984-05-28 半導体圧力センサの製造方法 Granted JPS60251673A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59108117A JPS60251673A (ja) 1984-05-28 1984-05-28 半導体圧力センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59108117A JPS60251673A (ja) 1984-05-28 1984-05-28 半導体圧力センサの製造方法

Publications (2)

Publication Number Publication Date
JPS60251673A JPS60251673A (ja) 1985-12-12
JPH0369187B2 true JPH0369187B2 (cg-RX-API-DMAC7.html) 1991-10-31

Family

ID=14476340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59108117A Granted JPS60251673A (ja) 1984-05-28 1984-05-28 半導体圧力センサの製造方法

Country Status (1)

Country Link
JP (1) JPS60251673A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2754860B2 (ja) * 1990-04-23 1998-05-20 日本電気株式会社 半導体素子およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5688371A (en) * 1979-12-20 1981-07-17 Toshiba Corp Semiconductor pressure converter

Also Published As

Publication number Publication date
JPS60251673A (ja) 1985-12-12

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